Rotary Vacuum Feedthroughs
BeamTec has extended its product line by a wide range of magnetically coupled rotary vacuum feedthroughs. Solid shaft rotary feedthroughs as well as hollow shaft models are available. These rotary feedthroughs are designed to be heavy duty and could support up to 10 Kg load on the rotating shaft.
The rotational motion is transmitted via a magnetic coupling from an atmospheric mechanism to the shaft in the vacuum. Since the case is made from one piece and open only to the vacuum side, a hermetic seal is guaranteed. Even large torque and high axial loads can be transmitted thanks to strong magnets.
Typical applications are any kind motion transfer that require rotational movement in vacuum systems such as substrate holders, transport rolls or swivel blinds.
Features & Benefits
- Precise transfer of the rotational motion
- Usable up to UHV
- Transfer of high torque forces
- Hermetically sealed housing
|Vollwellen Drehdurchführungen||Hohlwellen Drehdurchführungen|
|Laser etched scale||5° increments||1° increments|
|Beakable to||150 °C||150 °C|
|Material||SS 316/NdFeB Magnet||SS 316/NdFeB Magnet|
|Shaft||6 mm with tapping hole||Hollow shaft, 30 mm dia and 58 mm dia|
|Weight||Manual Actuator: ~0,4 Kg|
Pneumatic Actuator: ~0,5 Kg
|Heavy Duty Design|
2,6 bis 8,2 Kg
|Mounting||NW16CF Flange||Standard ConFlat Flange|
|Vacuum range||up to E-11 mbar|
|Life Time (Revolutions)||1.300.000||300.000|
|Max. rotating speed||36 rpm|
|Breakaway torque||30 Nm|
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