Plasma Power Supplies

40 kHz MF-Generators

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BDS-MF 5/10/15 kW @ 40kHz, High /Low Voltage AC plasma generator

The BDS-MF 40 kHz plasma generator was developed for plasma excitation in Sputter, PECVD and Plasma cleaning processes. The product range includes 5 kW, 10 kW and 15 kW devices that are capable to deliver up to 13000 V RMS output when combined with a downstream transformer.

The air cooled basic device provides the output voltage of 400 V, 650 V and 800 V on 3 taps for sputter processes. For PECVD processes an external HV transformer transforms the voltage to up to 7000 V RMS. The output is balanced type, capable to drive 4 symmetrical electrodes.

Additionally a special transformer allows for the use of atmospheric plasma.

Typical applications:

  • PECVD processes in bigger vacuum systems
  • Surface activation
  • Sputter and Glim processes for polymers and reflectors
  • Atmospheric plasma processes

 

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About BDISCOM Srl

BDISCOM Srl is an italien manufacurer of plasma processing tools that are specially designed for applications in research and industry. The product range includes plasma power supplies for several frequency ranges as well as smaller plasma systems for surface modifications. The product range includes plasma power supplies for several frequency ranges as well as smaller plasma systems for surface modifications.

 

Features & Benefits

  • Wide operating range with 3 taps
  • Ultra fast Arc-Handling
  • Air cooled
  • Analog + RS232 interface / Profibus
  • User friendly with frontpanel display
  • High efficiency >90%
  • Comptact and light weight, 22 kg, 19″ 4 U

Models & Specifications

 MF generatorMF generatorMF generator

BDS-MF5k-V2

BDS-MF10k-V2

BDS-MF15k-V2

Max. Ausgangsleistung5 kW10 kW15 kW
Max. Ausgangsspannung400 V / 650 V / 800 V400 V / 650 V / 800 V400 V / 650 V / 800 V
Zündspannung1000 V1000 V1000 V
Max. Ausgangsstrom15 A @ Tap 1;
6,5 A @ Tap 3
30 A @ Tap 1;
15 A @ Tap 3
35 A @ Tap 1;
19 A @ Tap 3
BetriebsmodusMF 40 kHz mit PulsoptionMF 40 kHz mit PulsoptionMF 40 kHz mit Pulsoption
Pulszeiten1 - 40 ms1 - 40 ms1 - 40 ms
DisplayAlphanumerisch LCD 2x40Alphanumerisch LCD 2x40Alphanumerisch LCD 2x40
Schnittstellendigital/analog (PE II kompatible Schnittstelle);
RS232;
Profibus optional
digital/analog (PE II kompatible Schnittstelle);
RS232;
Profibus optional
digital/analog (PE II kompatible Schnittstelle);
RS232;
Profibus optional
Arc Managementultraschnell über Spannnungsabfallultraschnell über Spannnungsabfallultraschnell über Spannnungsabfall
Versorgungsspannung3 x 400 Vac 50 / 60 Hz3 x 400 Vac 50 / 60 Hz3 x 400 Vac 50 / 60 Hz
Abmessungen19" , 4HE, 540mm, tief19" , 4HE, 540mm, tief19" , 4HE, 540mm, tief