Plasma Power Supplies

40 kHz MF-Generators

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BDS-MF 5/10/15 kW @ 40kHz, High /Low Voltage AC plasma generator

The BDS-MF 40 kHz plasma generator was developed for plasma excitation in Sputter, PECVD and Plasma cleaning processes. The product range includes 5 kW, 10 kW and 15 kW devices that are capable to deliver up to 13000 V RMS output when combined with a downstream transformer.

The air cooled basic device provides the output voltage of 400 V, 650 V and 800 V on 3 taps for sputter processes. For PECVD processes an external HV transformer transforms the voltage to up to 7000 V RMS. The output is balanced type, capable to drive 4 symmetrical electrodes.

Additionally a special transformer allows for the use of atmospheric plasma.

Typical applications:

  • PECVD processes in bigger vacuum systems
  • Surface activation
  • Sputter and Glim processes for polymers and reflectors
  • Atmospheric plasma processes

 

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About BDISCOM Srl

BDISCOM Srl is an italien manufacurer of plasma processing tools that are specially designed for applications in research and industry. The product range includes plasma power supplies for several frequency ranges as well as smaller plasma systems for surface modifications. The product range includes plasma power supplies for several frequency ranges as well as smaller plasma systems for surface modifications.

 

Features & Benefits

  • Wide operating range with 3 taps
  • Ultra fast Arc-Handling
  • Air cooled
  • Analog + RS232 interface / Profibus
  • User friendly with frontpanel display
  • High efficiency >90%
  • Comptact and light weight, 22 kg, 19″ 4 U

Models & Specifications

 DC/Pulsed DC SuppliesMF Generators 40 kHzRF Power SuppliesArc Power SuppliesGlow Power Supplies
MPS1500PMF generatorBDS HF AFP RF generator MF generatorGlimmstrom-Versorgung
Max. Output Power1500 W15 kW750 W6,25 kW6,25 kW
Max. Output Current2 A35 An. a.250 A1,6 A
Max. Output Voltage1200 V800 Vn. a.25 V4000 V
Mode of operationDC and PulseDCMF 40 kHz
with pulse option
HF 13,56 MHzDCDC
InterfacesRS232 or RS485,
Bluetooth, EthernetIP, Analog I/O
digital/analog (PE II compatible interface);
RS232;
Profibus optional
digital/analog IO, RS232,
Profibus optional
digital/analog;
RS232;
Profibus optional
digital/analog;
RS232;
Profibus optional
Dimensions19", 2 HE19", 4 HE1/2 19", 3 HE
19" , 4 HE19", 4 HE