Plasma Power Supplies
40 kHz MF-Generators
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BDS-MF 5/10/15 kW @ 40kHz, High /Low Voltage AC plasma generator
The BDS-MF 40 kHz plasma generator was developed for plasma excitation in Sputter, PECVD and Plasma cleaning processes. The product range includes 5 kW, 10 kW and 15 kW devices that are capable to deliver up to 13000 V RMS output when combined with a downstream transformer.
The air cooled basic device provides the output voltage of 400 V, 650 V and 800 V on 3 taps for sputter processes. For PECVD processes an external HV transformer transforms the voltage to up to 7000 V RMS. The output is balanced type, capable to drive 4 symmetrical electrodes.
Additionally a special transformer allows for the use of atmospheric plasma.
Typical applications:
- PECVD processes in bigger vacuum systems
- Surface activation
- Sputter and Glim processes for polymers and reflectors
- Atmospheric plasma processes
About BDISCOM Srl
BDISCOM Srl is an italien manufacurer of plasma processing tools that are specially designed for applications in research and industry. The product range includes plasma power supplies for several frequency ranges as well as smaller plasma systems for surface modifications. The product range includes plasma power supplies for several frequency ranges as well as smaller plasma systems for surface modifications.
Features & Benefits
- Wide operating range with 3 taps
- Ultra fast Arc-Handling
- Air cooled
- Analog + RS232 interface / Profibus
- User friendly with frontpanel display
- High efficiency >90%
- Comptact and light weight, 22 kg, 19″ 4 U
Models & Specifications
| DC/Pulsed DC Supplies | MF Generators 40 kHz | RF Power Supplies | Arc Power Supplies | Glow Power Supplies | |
|---|---|---|---|---|---|
 |  |  | |  | |
| Max. Output Power | 1500 W | 15 kW | 750 W | 6,25 kW | 6,25 kW |
| Max. Output Current | 2 A | 35 A | n. a. | 250 A | 1,6 A |
| Max. Output Voltage | 1200 V | 800 V | n. a. | 25 V | 4000 V |
| Mode of operation | DC and PulseDC | MF 40 kHz with pulse option | HF 13,56 MHz | DC | DC |
| Interfaces | RS232 or RS485, Bluetooth, EthernetIP, Analog I/O | digital/analog (PE II compatible interface); RS232; Profibus optional | digital/analog IO, RS232, Profibus optional | digital/analog; RS232; Profibus optional | digital/analog; RS232; Profibus optional |
| Dimensions | 19", 2 HE | 19", 4 HE | 1/2 19", 3 HE | 19" , 4 HE | 19", 4 HE |