Ion Sources

BeamTec provides advanced power supplies by Kaufman&Robinson Inc. for gridless and gridded DC and RFICP ion source versions as well as power supplies for linear anode layer sources resp. inverted magnetron sources by BDISCOM Srl.

Power Supply Technology

Features & Benefits

• Primary Switched Controller
  • small, light weight design; fast arc handling
• Constant Current Control Mode
  • for stable process at low anode voltages
• Modular Power Supply System
  • Individual system configurations

Gridless End-Hall Power Supplies

eH200, eH400, eH1000, eH2000, eH3000, Mark I, Mark II, Mark III

Cathode

20 A, 15 A, 10 A or 5 A emission current
Soft Start

Auto Controller

System control
Gas control – 4 MFCs
Open or closed gas loop control
Automatic Start/Stop Sequence

Protection

Arc / short management
Current & Power Limits

Remote interface

Isolated analog & RS-232

Available as total integrated package or as individual discrete modules

DC Gridded Power Supplies

KDC10, KDC40, KDC75, KDC100, KDC160

Switch mode

Low stored energy output

DC discharge power:

Strahl

0 A, 1200 V DC

Accelerator

6 A, 600 V

Filament Neutralizer

2 A Emission

Auto Controller interface

Available as total integrated package or as individual discrete modules

Protection

Arc / short management
Current & Power Limits

Remote interface

Isolated analog & RS-232