Electron Beam Evaporators

Single Hearth Evaporators

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BeamTec offers a full selection of electron beam evaporators for thin film applications. The product range includes evaporators for both production-oriented metallization processes and optical capture applications.

Features & Benefits

  • Efficient water flow
  • Hermetically sealed magnetic housing
  • Self-contained deflection assembly
  • Industry compatible dimensions / interfacing
  • High operating performance
  • Easy installation with outstanding vacuum compatibility
  • High Performance and LiftOff Filament Block

EB-1 nano

This evaporator is designed for deposition applications requiring compact dimensions while still enabling dynamic beam deflection. An optional flange mount assembly can be inserted via an ISO63K flange from the bottom.

Max. Operating power 4 kW
Max. Emission current 500 mA @ 8 kV
High voltage range 6-8 kV
Coil deflection current (x/y) +/-2 A
Mounting ISO63K or ISO63CF


1 x 4 cm ³

EB10-60

This model is designed for production oriented optical and metalization depositions. The maximum crucible volume of 100 cm³ and a maximum operating power of 10 kW support long term processes at high deposition rates.

Max. Operating power 10 kW
Max. Emission current 1000 mA @10 kV
High voltage range 6 – 10 kV
Coil deflection current (x/y) +/- 3 A

Typical Standard crucible volumes
1 x 30 cm³
1 x 60 cm³
1x 100 cm³

EB-1

This unit is designed for deposition applications in medium size vacuum systems. The source features replaceable crucibles, 3/8″ water lines for cooling and replacable coils. UHV compatible versions are available for ultraclean environment.

Max. Operating power 6 kW
Max. Emission current 600 mA @8 kV
High voltage range 6 – 10 kV
Coil deflection current (x/y) +/- 1 A

Typical Crucible volume
1 x 4 cm³
1 x 7 cm³
1 x 15 cm³

EB-5

This evaporator is designed for production oriented metalization deposition applications. With a maximum hearth capacity of 100 cm³ and 15 kW max. operating power the source supports long process runs at high evaporation rates. UHV compatible versions are available for ultraclean environment.

Max. Operating power 15 kW
Max. Emission current 1500 mA @10 kV
High voltage range 5 – 10 kV
Coil deflection current (x/y) +/- 1 A

Standard crucible volumes
1 x 25 cm³
1 x 40 cm³
1 x 100 cm³

 

 EB1-NanoEB10-60EB-1EB-5
Max. Betriebsleistung4 kW10 kW6 kW15 kW
Hochspannungsbereich6 - 8 kV6 - 10 kV6- 10 kV6 - 10 kV
Max. Emissionsstrom500 mA @ 8 kV1000 mA @ 10 kV600 mA @ 10 kV1500 mA @ 10 kV
Max. Filamantleistung500 W500 W600 W600 W
Spulenablenkstrom (x/y)± 2 A± 3 A± 1 A± 1 A
Tiegelvolumen4 x 4 cm³1 x 30 / 60 /100 cm³1 x 4 / 7 / 15 cm³1 x 25/40/100 cm³
Abmessungen Vakuum95 mm H x dia 61 mm115 mm H x 112 mm W x 226 mm L81 mm H x 81 mm W x 127 mm L74 mm H x 122 mm W x 276 mm L
Gewicht1,5 kg12 kg3 kg9 kg
Magnet current feedthrough
Magnet current feedthrough
SB-HVFT2
High voltage feedthrough

 

We are happy to send you up-to-date product information on request viainfo(at)beamtec.de.