Electron Beam Evaporation
High Voltage Power Supplies & Controls
Home » Electron Beam Evaporation » High Voltage Power Supply & Control
EBEAM High Voltage Power Supply
The EBEAM series is BeamTec’s current high voltage power supply for electron beam evaporators: rugged, compact units with up to 8 kW output power and up to 10 kV. An integrated touch panel allows local operation and monitoring directly at the unit. Ultra-fast arc management together with an arc current limitation (reaction time below 1 µs) ensures stable operation even under continuous arcing. The EBEAMx-HV-F variant already includes a 600 W DC filament power supply.
Features
- 3 / 6 / 8 kW output power
- High voltage 4 – 10 kV neg.
- Touch panel for local operation & monitoring
- Ultra-fast, adjustable arc management
- Arc current limitation, reaction time < 1 µs
- Low stored output energy
- Optional integrated 600 W filament supply (EBEAMx-HV-F)
- Interface via BeamTrek (DB25), RS232; optional EtherCat / ProfiBus / ProfiNet
EBEAMx-HV
Output power 3 / 6 / 8 kW
Emission current 375 mA@8 kV … 800 mA@10 kV
High voltage range 4 – 10 kV neg.
HV outputs 1
Filament external (Stingray-DC / -DC-R)
Operation touch panel; A/D via BeamTrek
Supply voltage 3× 400 VAC + 1× 230 VAC (control)
Dimensions 19", 5 U, 520 mm deep
Order no. BDS-EBEAM3/6/8-HV
EBEAMx-HV-F
Output power 3 / 6 / 8 kW
Emission current 375 mA@8 kV … 800 mA@10 kV
High voltage range 4 – 10 kV neg.
Filament integrated, 600 W DC (60 A @ 10 VDC)
Filament / emission control integrated, PID adjustable
Filament cable up to 5 m to HV feedthrough (standard 2 m)
Dimensions 19", 5 U, 520 mm deep
Order no. BDS-EBEAM3/6/8-HV-F
Technical comparison
| Feature | WARP3 | WARP10 | EBEAMx-HV | EBEAMx-HV-F |
|---|---|---|---|---|
| Output power | 3 kW | 10 kW | 3 / 6 (/8) kW | 3 / 6 (/8) kW |
| Current | 0–375 / 500 mA | 0–1000 mA | 375 mA@8 kV; 600 mA@10 kV; 800 mA@8 kV | 375 mA@8 kV; 600 mA@10 kV; 800 mA@8 kV |
| Voltage | 4–8 / 4–6 kV neg. | 4–10 kV neg. | 4–10 kV neg. | 4–10 kV neg. |
| HV outputs | 1 | up to 2 | 1 | 1 |
| Filament | external (Stingray) | external; up to 2 | external (Stingray) | integrated 600 W (60 A @ 10 VDC) |
| Arc management | adjustable | adjustable | adjustable (interface + front panel) | adjustable (interface + front panel) |
| Interface | A/D 2× DB9; USB/RS232 | A/D 2× DB9; USB/RS232 | touch panel; DB25 (BeamTrek); RS232; opt. EtherCat/ProfiBus/ProfiNet | touch panel; DB25 (BeamTrek); RS232; opt. EtherCat/ProfiBus /ProfiNet |
| Mains | 1× 230 VAC ±10 % | 3× 400 VAC | 3× 400 VAC + 1× 230 VAC (control) | 3× 400 VAC + 1× 230 VAC (control) |
| Dimensions | 19″, 2 U, 405 mm | 19″, 4 U, 500 mm | 19″, 5 U, 520 mm | 19″, 5 U, 520 mm |
WARP™ High Voltage Power Supply (complementary: 3 kW & 10 kW)
The EBEAM series is complemented by the primary-switched WARP series in the 3 kW and 10 kW class. The WARP10 can drive two evaporators with a total power of 10 kW from a single 4 U unit.
Features
- 3 kW (WARP3) or 10 kW (WARP10)
- Primary-switched power stage
- Ultra-fast arc management
- Low stored output energy
- WARP3: single-phase (1× 230 VAC)
- WARP10: up to 2 HV outputs with emission measurement
WARP 3
Max. output power 3 kW
Max. emission current 375 / 500 mA
High voltage range 4 – 8 / 4 – 6 kV neg.
Evaporators 1
Supply voltage 1× 230 VAC, 50/60 Hz
Dimensions 19", 2 U, 405 mm deep
Order no. BT-WARP3
WARP 10
Max. output power 10 kW
Max. emission current 1000 mA
High voltage range 4 – 10 kV neg.
Evaporators 1 / 2 with emission measurement
Supply voltage 3× 400 VAC, 50/60 Hz
Dimensions 19", 4 U, 500 mm deep
Order no. BT-WARP10
BeamTrek™ Evaporation Controller
The BeamTrek evaporation controller enables control of beam deflection, emission and pocket selection via a touch-screen remote. At its core is the deflection control for the electron beam, offering versatile beam-shaping options. BeamTrek is compatible with the EBEAM and WARP supplies as well as common third-party units.
Stingray – Filament Power Supplies
For the HV-only variant EBEAMx-HV (without integrated filament) as well as for WARP, BeamTec offers the DC filament power supplies of the Stingray series in primary-switched circuit technology.
Stingray-DC
Couples directly to a high voltage feedthrough and requires no additional rack space or separate filament cables.
- Max. 50 A filament current; 10 V DC
- For all common electron beam evaporators
- Compatible with BeamTrek, EBEAMx-HV, WARP
Stingray-DC-R
Rack-mounted version in a compact housing; up to 2 units on a 19"/3 U panel.
- Max. 50 A filament current; 10 V DC
- For all common electron beam evaporators
- Compatible with BeamTrek, EBEAMx-HV, WARP
