Plasma Power Supplies
DC-/Pulsed DC Supplies
MF generators 40 kHz
RF power supplies
Arc/Glow Power Supplies
BeamTec GmbH provides supplies power for your plasma process.
In the program we have DC and pulsed DC power supplies, which can supply up to 1500 W for 2 connected magnetron sputtering sources or glow discharge electrodes.
They are also ideal for applications requiring precise coatings at low coating rates, as they can be stably operated even at low power levels (<2W).
Our 40 kHz MF generators from BDISCOM were developed for plasma excitation in sputtering, PECVD and plasma cleaning processes. A special transformer allows for the use of atmospheric plasma.
The 13,56 MHz RF Generators deliver a power output of 100 W to 750 W, this makes them suited for operation on small magnetrons or for smaller chambers.
Matchboxes matche the plasma impedance automatically to the 50 Ohm impedance of the 13,56 MHz generator
The BDS-ARC devices are power supplies designed for arc evaporators with current consumtion of up to 250 A.
The BDS-GLOW devices are compact power supplies for glow discharge processes.
Also in our program are DC / RF switches, RF blocking filter and low-pass filter from the manufacturer Manitou Systems. They are used to switch and connect the output of RF power generators, DC sputtering power supplies or impedance matching networks.
|DC/Pulsed DC Supplies||MF Generators 40 kHz||RF Power Supplies||Arc Power Supplies||Glow Power Supplies|
|Max. Output Power||1500 W||15 kW||750 W||6,25 kW||6,25 kW|
|Max. Output Current||2 A||35 A||n. a.||250 A||1,6 A|
|Max. Output Voltage||1200 V||800 V||n. a.||25 V||4000 V|
|Mode of operation||DC and PulseDC||MF 40 kHz|
with pulse option
|HF 13,56 MHz||DC||DC|
|Interfaces||RS232 or RS485,|
Bluetooth, EthernetIP, Analog I/O
|digital/analog (PE II compatible interface); |
|digital/analog IO, RS232,|
|Dimensions||19", 2 HE||19", 4 HE||1/2 19", 3 HE||19" , 4 HE||19", 4 HE|