Electron Beam Evaporators

UHV Evaporators

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BeamTec provides UHV evaporators with a variety of crucible volumes and power classes. Only UHV compatible components are used in the design for this kind of evaporators.

Small Single Hearth EvaporatorEB1Nano-UHV

The small 4kW evaporator with max. 4 cm³ crucible volume is equipped with a permanent magnet system for the primary deflection as well as an electromagnetic coil system for the two-dimensional, dynamic deflection of the electron beam. The ISO63CF mounting flange incorporates all media feedthroughs like high voltage, magnet current and water.

Max. Operating power 4 kW
High voltage range 6-8 kV
Coil deflection current (x/y) +/-2 A
Mounting ISO63K or ISO63CF

Crucible volume
1 x 4 cm³

Single Hearth Evaporator EBS6-xx-UHV

The small evaporator is availble for pocket sizes 4, 7 and 15 cm³. With a rated power of 6 kW this unit can operate in a wide range of applications.

Max. Operating power 6 kW
High voltage range 5 – 10 kV
Coil deflection current (x/y) +/- 1 A
Mountingoptional on CFF

Typical Crucible volume
1 x 4 cm³ (-04)
1 x 7 cm³ (-07)
1 x 15 cm³ (-15)

Single Hearth Evaporator EBS15-xxx-UHV

The large evaporator can be equipped with a maximum pocket volume of 100 cm³. With an operating power of up to 15 kW it is specialized for the use in metallization system or applications which require large capacity of the evaporant.

Max. Operating power 15 kW
High voltage range 5 – 10 kV
Coil deflection current (x/y) +/- 1 A
Mountingoptional on CFF

Typical crucible volume
1 x 25 cm³ (-025)
1 x 40 cm³ (-040)
1 x 100 cm³ (-100)

Multi Hearth Evaporator EBL6-xxx-UHV

The linear UHV multi hearth evaporator EBL6-UHV enables evaporation of up to 6 different materials without breaking vacuum. All utilites are installed on a horizontally mounted ISO160CF flange.

Max. Operating power 6 kW
High voltage range 5 – 10 kV
Coil deflection current (x/y) +/- 1 A
Mounting ISO160CF / ISO200CF incl. HV-, magnet,- water- and shutter-feedthrough

Pocket rotation manual/(motorized optional)
Typical crucible volume
5 x 4 cm³ (-504) 7 x 4 cm³ (-704)
4 x 7 cm³ (-407) 6 x 7 cm³ (-607)
3 x 15 cm³ (-315) 4 x 15 cm³ (-415)
 EB1Nano-UHVEBS6-xx-UHVEBS15-xxx-UHVEBL6-xxx-UHV
Max. Betriebsleistung4 kW6 kW15 kW6 kW
Hochspannungsbereich6 - 8 kW5 - 10 kV
Spulenablenkstrom (x/y)± 2 A± 1 A
MontageISO63K oder ISO63CFoptional auf CF Flanschoptional auf CF FlanschISO160CF / ISO200CF inkl. HV-, Magnet,-
Wasser- und Shutter-Durchführung
Tiegelantrieb---manuell / (elektrisch optional)
Typ. Tiegelkonfigurationen1 x 4 cm³1 x 4 cm³ (-04)
1 x 7 cm³ (-07)
1 x 15 cm³ (-15)
1 x 25 cm³ (-025)
1 x 40 cm³ (-040)
1 x 100 cm³ (-100)
5 x 4 cm³ (-504)
4 x 7 cm³ (-407)
3 x 15 cm³ (-315)
7 x 4 cm³ (-704)
6 x 7 cm³ (-607)
4 x 15 cm³ (-415)

We are happy to send you up-to-date product information on request viainfo(at)beamtec.de.