Electron Beam Evaporators
Multi Hearth Evaporators
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The new SmartBeam evaporator series is suitable for optical coating processes as well as for metalization at high coating rates. An efficient cooling system of the crucible and the deflection unit guarantees reliable operation in demanding production processes.
All multi hearth evaporators produce a small beam diameter of 3 mm with minimal distortion over the crucible surface.
The crucible drive is carried out by means of a DC motor with built-in encoder and absolute position marking.
In the EB M series, the motor and crucible drive are on the atmosphere side and are flanged axially to the crucible shaft.
In the EB S series, the motor and crucible drive are encapsulated in the vacuum. This allows free positioning of the evaporator within the coating chamber.
Features & Benefits
- Magnet system with low inductivity and effective cooling
- Small beam diameter independant from its position on the crucible
- DC motor on atmosphere side with integrated encoder und absolute positioning
- High performance and LiftOff filament block
- Support of high Sweep frequencies
- Excellent control of the beam for opt. Materials
- Reliable crucible positioning with stall protection
- Easy filament installation and long filament lifetime
Options
- Evaporator positioning in chamber without restrictrions (EB S-series)
- Magnetic crucible cover plate for reduced secondary electron bombardment towards substrate
- Customer specified pocket geometry
- Ferrofluid sealed rotary feedthrough for crucible rotation (only EBM-series); allows base pressure down to 1E-9 mBar
EB M-8 II with motor und crucible drive on atmosphere side
EB S-8 II with motor und crucible drive on vacuum side
| EB M-4x4 | EB M-6 II EB S-6 II | EB M-8 II EB S-8 II | EB M-10 II EB S-10 II | |
|---|---|---|---|---|
 |  | |  | |
| Max. operating power | 4 kW | 6 kW | 8 kW | 10 kW |
| High voltage range | 4 - 10 kV | |||
| Magnet deflection current (x/y) | ± 3 A | |||
| Beam diameter | 3 mm, with minimal distortion on crucible surface | |||
| Crucible drive | DC motor with built-in encoder and absolute position marking EBM-x: Motor and positioning at atmosphere axially flanged to crucible shaft EBS-x: motor and positioning encapsulated in vacuum; Evaporator freely positionable | |||
| Standard crucible volumes | 4 x 4 cm³ | 4 x 8 cm³ 6 x 6 cm³ 8 x 4 cm³ | 4 x 40 cm³ 6 x 20 cm³ 8 x 15 cm³ | 4 x 60 cm³ 6 x 40 cm³ 8 x 20 cm³ |
| Dimensions vacuum (H x B x L in mm) : | 120 x 87 x 206 | 130 x 112 x 250 164 x 112 x 282 | 130 x 150 x 304 164 x 150 x 304 | 130 x 190 x 346 164 x 190 x 346 |
 Magnet current feedthrough |  High voltage feedthrough |
 LiftOff Filament Block |  Crucible drive |
We are happy to send you up-to-date product information on request viainfo(at)beamtec.de.