Thin Film Measurement

Thin Film Monitor TFM260

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Our thin film monitor TFM260 for the measurement and control of the film thickness is designed to achieve reliability and ease of use while still offering all required functions for the manual control of the deposition process.

You can purchase the Thin Film Monitor TFM260 directly in our Onlineshop.

Features & Benefits

2 high resolution measurement channels; optional up to 6 channels
4.3″ touch screen graphical display
Rate/thickness/frequency vs. time charts
6 programmable analog outputs for rate/ thickness recording or power control
4 digital inputs (5 V); 4 relay outputs
D/A and RS232 interface compatibility to SQM160
User Interface: RS232/RS485 and Ethernet
Front panel USB port for storage and firmware upgrade
Supports one QMB6-transducer (USB/RS485) directly and QMB6-PoE units via external PoE-switch

The TFM260 mutli channel thin film monitor is used to measure rate and thickness in thin film deposition processes. The touch screen display allows for intuitive operation and provides time charts for detailed process control. Two sensor inputs are standard and four additional sensor inputs are optional. All of them featuring high resolution measurement of 0.01 Hz at up to 10 Hz sampling rate. Six analog outputs allow rate and thickness recording or can be assigned to control manual power with any deposition units. Sensor inputs can be assigned to different materials, configured for dual sensors or averaged using individual weights. Four relay outputs allow the TFM260 to control source or sensor shutters, trigger time and thickness setpoints, and signal crystal failure. Digital inputs allow external signals to start/stop the layer and zero readings.

QCM Sensor Eingang	Standard: 2; optional: 4 oder 6 unter Verwendung von externen Oszillatoren
Frequenzbereich	4 - 6,5 MHz
Frequenz-Auflösung	`±` 0,04 Hz bei 10 reads/sec
Frequenz-Stabilität	`±` 2 ppm, bei 0 °C bis 50 °C
Wählbare Messperiode	`±` 0,10 bis 2 s (in 0,05 s Schritten)
Messfilter	1 bis 20 Messungen mit programmierbarem Alpha-Filter
Gespeicherte Schichten	99
Analoge Ausgänge	6 (0 bis 10 VDC) für Rate/Schichtdicke/Frequenz
Digitale Eingänge/Ausgänge	4 Eingänge (5 V), 8 Relaisausgänge
Serielle Schnittstellen	Extern: RS-232/RS-485 + Ethernet QMB6 Messwertaufnehmer: QMB6-U oder QMB6-4; QMB6-PoE via externerm PoE-Switch
Frontplattenbedienung	4,3“ Touchscreen-Display mit Drehgeber
Leistung	100 - 240 VAC, 50/60 Hz, 20 W
CE-Konformität	Class 1 equipment, 73/72/EEC LVD, 89/336/EEC ECD
Gehäuse/Montage	1/2" Schaltschrank, 3-1/2"
Gewicht	3 kg
Windows Software (beiliegend)	Ermöglicht Fern-Setup und Betrieb, Datenaufzeichnung, kann auch mit SQM160 Software betrieben werden

Passive external oscillator incl. 10 cm BNC cable (BT-QM-EO)

BNC cable

Test quartz crystal

Brochure “TFM260” (264 KB)