Thin Film Measurement

Thin Film Monitor EonLT-DM

Home » Thin Film Measurement » Thin Film Monitor EonLT-DM

The EonLT-DM is a temperature and film thickness monitor. Temperature monitoring outperforms conventional controllers that are blind to thermal changes in the crystal. Temperature monitoring outperforms conventional controllers that are blind to thermal changes in the crystal.

You can purchase the Thin Film EonLT-DM directly in our Onlineshop.

Features & Benefits

2 temperature sensors
2 quartz crystal sensors
Frequency resolution of up to 0,0015 Hz
RS-232 interface
Real time graphing of temperature, rate and frequency
Relays for the process automatization (shutter control)
Widely expandable systems – up to 255 Eon-LTs™ can be networked
All connecting cables, software (Labview Runtime) and instruction manual included

The EonLT-DM competes with devices twice the cost and offers 2 quartz sensor channels, control of 2 sources and deposition processes simultaneously and 2 temperature sensors.

Standard quartzes as well as 6 MHz AT and RC quartzes are supported.

Measurement frequency	4 - 10 MHz
Frequency resolution	up to 0,0015 Hz
Sensor input	2 x BNC female (1 - 10 MHz, 1 - 200 Ω) 2 x miniature-thermoelement Type K (± 0,25 °C)
Interfacees	RS-232 USB via adapter cable
Outputs	2 relay outputs via DB9
Supply voltage	24 V DC
Dimensions	114,3 mm x 63,5 mm x 25,4 mm
Weight	~0,2 kg

External Oscillator

BNC cable

Test quartz crystal

Broshure “EonLT-DM” (469 KB)