Thin Film Measurement

Thin Film Monitor EonLT-DM

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The EonLT-DM is a temperature and film thickness monitor. Temperature monitoring outperforms conventional controllers that are blind to thermal changes in the crystal. Temperature monitoring outperforms conventional controllers that are blind to thermal changes in the crystal.

You can purchase the Thin Film EonLT-DM directly in our Onlineshop.

Features & Benefits

  • 2 temperature sensors
  • 2 quartz crystal sensors
  • Frequency resolution of up to 0,0015 Hz
  • RS-232 interface
  • Real time graphing of temperature, rate and frequency
  • Relays for the process automatization (shutter control)
  • Widely expandable systems – up to 255 Eon-LTs™ can be networked
  • All connecting cables, software (Labview Runtime) and instruction manual included

The EonLT-DM competes with devices twice the cost and offers 2 quartz sensor channels, control of 2 sources and deposition processes simultaneously and 3 temperature sensors.

Standard quartzes as well as 6 MHz AT and RC quartzes are supported.

Messfrequenz4 - 10 MHz
Messauflösungbis zu 0,0015 Hz
Sensoreingänge2 x BNC weiblich (1 - 10 MHz, 1 - 200 Ω)
2 x Miniatur-Thermoelement Typ K (± 0,25 °C)
SchnittstellenRS-232
USB über Adapter Kabel
Ausgänge2 Relaisausgänge per DB9
Versorgungsspannung24 V DC
Maße114,3 mm x 63,5 mm x 25,4 mm
Gewicht~0,2 kg

 

BT-QM-EO

External Oscillator

 

Accessories cables

BNC cable

Accessory test quartz crystal

Test quartz crystal