Plasma Power Supplies
13,56 MHz Generators
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RF Generators
BDS-HF 200/300/750 AFP-Series
BeamTec introduces RF generators with an active front panel user interface that deliver a power output of up to 750 W. The BDS HF series is a class E circuit with 85-90% typical efficiency. In addition to an analogue / digital interface, an optional control via Profibus is also available.
About BDISCOM Srl
BDISCOM Srl is an italien manufacurer of plasma processing tools that are specially designed for applications in research and industry. The product range includes plasma power supplies for several frequency ranges as well as smaller plasma systems for surface modifications. The product range includes plasma power supplies for several frequency ranges as well as smaller plasma systems for surface modifications.
BDS-AMN 750 Auto Matching Unit
The automatic Matchbox BDS-AMN750 matches the plasma impedance automatically to the 50 Ohm impedance of the 13,56 MHz generator. Two motorized power capacitors are used for fast power adjustment in an L configuration or for medium impedance via a TEE configuration. An integrated DC-BIAS measurement allows for the control of an constant bias from the BDS-AFP generator series.
Specifications
 | |
|---|---|
BDS-HF-xxx AFP | |
| Output power | 200 W, 300 W, 750 W |
| Frequency | 13,56 MHz |
| User interface | Touch Screen Display withEncoder |
| Outputs | N-Socket |
| Interfaces | digital/analog IO, RS232, Profibus optional |
| Main supply | 1x 230 VAC |
| Dimensions | 1/2 19" x 3 U, 410 mm depth |