Plasma Power Supplies

13,56 MHz Generators

Home» Plasma Power Supplies » 13,56 MHz Generators

RF Generators

BDS-HF 200/300/750 AFP-Series

BeamTec introduces RF generators with an active front panel user interface that deliver a power output of up to 750 W. The BDS HF series is a class E circuit with 85-90% typical efficiency. In addition to an analogue / digital interface, an optional control via Profibus is also available.

BDS-HF 100/200/300/750 BB-Serie

The BB series of RF plasma supplies has been designed for exclusive operation via a digital / analogue interface. Starting with a power of only 100W, this device series is ideally suited for operation on small magnetrons or for smaller chambers for plasma pretreatment.

Typical applications:

  • RF-Plasma- and Sputter processes in smaller vacuum systems
  • Surface activation

bdiscom logo

About BDISCOM Srl

BDISCOM Srl is an italien manufacurer of plasma processing tools that are specially designed for applications in research and industry. The product range includes plasma power supplies for several frequency ranges as well as smaller plasma systems for surface modifications. The product range includes plasma power supplies for several frequency ranges as well as smaller plasma systems for surface modifications.

 

BDS-AMN 750 Auto Matching Unit

The automatic Matchbox BDS-AMN750 matches the plasma impedance automatically to the 50 Ohm impedance of the 13,56 MHz generator. Two motorized power capacitors are used for fast power adjustment in an L configuration or for medium impedance via a TEE configuration. An integrated DC-BIAS measurement allows for the control of an constant bias from the BDS-AFP generator series.

Specifications

 BDS HF AFP RF generator BDS HF BB RF generator

BDS-HF-xxx AFP

BDS-HF-xxx BB

Ausgangsleistung200 W, 300 W, 750 W100 W, 200 W, 300 W, 750 W
Frequenz13,56 MHz13,56 MHz
BedienungTouch Screen Display mit Encoderexterne Schnittstelle
AusgängeN-BuchseN-Buchse
Schnittstellendigital/analog IO, RS232,
Profibus optional
digital/analog IO
Hauptversorgung1x 230 VAC1x 230 VAC
Abmessungen1/2 19" x 3 HE, 410 mm tiefBDS.HF200.BB: 270 x 70 x 155 mm
BDS.HF750.BB: 133 x 269 x 410 mm