Plasma Power Supplies

DC and pulsed DC generators

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The MPS models are versatile dual source power supplies for R&D coating & cleaning applications. They can control up to two sources sequentially which can be any combination of compact magnetron sputter sources or glow discharge electrodes.
The model MPS1500P offers DC or pulsed DC mode operation with intuitive pulse width control on the graphical LCD screen. DC only models are available in 500 and 1500 Watts power range.

Stability and Control

Extremely stable output allows for operating the sources even at low power levels (< 2W). This makes this device unique in its class and ideal for low rate and precise coating applications.

Features & Benefits

  • DC and/or pulsed DC operating mode
  • Integrated switch to connect up to two magnetrons
  • Fast arc detection and suppression
  • Selectable voltage, current & power regulation mode
  • Stable operation down to 2 Watts
  • Large impedance range
  • Ideal for 1“ to 4“ magnetron operation
  • User friendly interface with LCD display, keypad and rotary encoder operation
 MPS1500PMPS1500PMPS1500P

MPS500DC

MPS1500DC

MPS1500P

Max output power500 W DC1500 W DC1500 W (DC)
1050 W (Pulsed DC - unipolar)
Output voltage1000 V (ignition 1200 V)1000 V (ignition 1200 V)1000 V (ignition 1200 V)
Output current2 A max3 A max3 A max
Mode of operationDCDCDC und PulseDC (duty cycle 2 ..70 %)
Outputs2; connector N-Typ2; connector N-Typ2; connector N-Typ
Frequency of operation--10..300 kHz for PulseDC
Main supply230 VAC/3,15 A230 VAC/max. 8 A230 VAC/max. 8 A
DisplayGraphics LCD 240x64Graphics LCD 240x64Graphics LCD 240x64
InterfacesRS232 or RS485 (ModBus RTU-Protocol) and EthernetIP (ModBus TCP Protocol) , Analog I/ORS232 or RS485 (ModBus RTU-Protocol) and EthernetIP (ModBus TCP Protocol) , Analog I/ORS232 or RS485 (ModBus RTU-Protocol) and EthernetIP (ModBus TCP Protocol) , Analog I/O
Arc managementAdvanced; < 2 us response timeAdvanced; < 2 us response timeAdvanced; < 2 us response time
Monitoring of target usageYesYesYes