Plasma Power Supplies
DC and pulsed DC generators
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The MPS models are versatile dual source power supplies for R&D coating & cleaning applications. They can control up to two sources sequentially which can be any combination of compact magnetron sputter sources or glow discharge electrodes.
The model MPS1500P offers DC or pulsed DC mode operation with intuitive pulse width control on the graphical LCD screen. DC only models are available in 500 and 1500 Watts power range.
Stability and Control
Extremely stable output allows for operating the sources even at low power levels (< 2W). This makes this device unique in its class and ideal for low rate and precise coating applications.
Features & Benefits
- DC and/or pulsed DC operating mode
- Integrated switch to connect up to two magnetrons
- Fast arc detection and suppression
- Selectable voltage, current & power regulation mode
- Stable operation down to 2 Watts
- Large impedance range
- Ideal for 1“ to 4“ magnetron operation
- User friendly interface with LCD display, keypad and rotary encoder operation
 | | | |
|---|---|---|---|
MPS500DC | MPS1500DC | MPS1500P | |
| Max output power | 500 W DC | 1500 W DC | 1500 W (DC) 1050 W (Pulsed DC - unipolar) |
| Output voltage | 1000 V (ignition 1200 V) | 1000 V (ignition 1200 V) | 1000 V (ignition 1200 V) |
| Output current | 2 A max | 3 A max | 3 A max |
| Mode of operation | DC | DC | DC und PulseDC (duty cycle 2 ..70 %) |
| Outputs | 2; connector N-Typ | 2; connector N-Typ | 2; connector N-Typ |
| Frequency of operation | - | - | 10..300 kHz for PulseDC |
| Main supply | 230 VAC/3,15 A | 230 VAC/max. 8 A | 230 VAC/max. 8 A |
| Display | Graphics LCD 240x64 | Graphics LCD 240x64 | Graphics LCD 240x64 |
| Interfaces | RS232 or RS485 (ModBus RTU-Protocol) and EthernetIP (ModBus TCP Protocol) , Analog I/O | RS232 or RS485 (ModBus RTU-Protocol) and EthernetIP (ModBus TCP Protocol) , Analog I/O | RS232 or RS485 (ModBus RTU-Protocol) and EthernetIP (ModBus TCP Protocol) , Analog I/O |
| Arc management | Advanced; < 2 us response time | Advanced; < 2 us response time | Advanced; < 2 us response time |
| Monitoring of target usage | Yes | Yes | Yes |
Brochure “MPS Magnetron Power Supplies” (2.50 MB)