Plasma Power Supplies

DC and pulsed DC generators

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The MPS500 and MPS1500P are versatile dual source power supplies for R&D coating & cleaning applications. They can control up to two sources which can be any combination of compact magnetron sputter sources or glow discharge electrodes.
The 1500W model MPS1500P offers DC or pulsed DC mode operation with intuitive pulse with control on the graphical LCD screen.
The 500W model MPS500 also features one input for monitoring of an active vacuum gauge with interlock functionality.

Stability and Control

Extremely stable output allows for operating the sources even at low power levels (< 2W). This makes this device unique in its class and ideal for low rate and precise coating applications.

Features & Benefits

  • DC and/or pulsed DC operating mode
  • Integrated switch to connect up to two magnetrons
  • Fast arc detection and suppression
  • Selectable voltage, current & power regulation mode
  • Stable operation down to 2 Watts
  • Large impedance range
  • Ideal for 1“ to 4“ magnetron operation
  • User friendly interface with LCD display, keypad and rotary encoder operation
  • One pressure measurement gauge channel for active gauges (list of gauges frequently updated by firmware upload)
 MPS500MPS1500P

MPS500

MPS1500P

Output power1...500 W3...1500W
Output voltage1000 V1200 V max
Output current1 A max2 A max
Mode of operationDCDC und PulseDC
Outputs2; connector N-Typ2; connector N-Typ
Frequency of operation-1...75 kHz for PulseDC
Main supply230 VAC/3,15 A230 VAC/6,15 A
DisplayAlphanumeric LCD 2x16Graphics LCD 240x64
Active vacuum gauge supportYesNo
InterfacesRS232 or RS485,
Bluetooth, EthernetIP, Analog I/O
RS232, EthernetIP, Analog I/O
Arc managementAdvanced with controlAdvanced
Monitoring of target usageNoYes

MPS1500P-back