Plasma Power Supplies
RF Generators
BDS-HF 200/300/750 AFP-Series
BeamTec introduces RF generators with an active front panel user interface that deliver a power output of up to 750 W. The BDS HF series is a class E circuit with 85-90% typical efficiency. In addition to an analogue / digital interface, an optional control via Profibus is also available.
BDS-AMN 750 Auto Matching Unit
The automatic Matchbox BDS-AMN750 matches the plasma impedance automatically to the 50 Ohm impedance of the 13,56 MHz generator. Two motorized power capacitors are used for fast power adjustment in an L configuration or for medium impedance via a TEE configuration. An integrated DC-BIAS measurement allows for the control of an constant bias from the BDS-AFP generator series.
About BDISCOM Srl
BDISCOM Srl is an italien manufacurer of plasma processing tools that are specially designed for applications in research and industry. The product range includes plasma power supplies for several frequency ranges as well as smaller plasma systems for surface modifications. The product range includes plasma power supplies for several frequency ranges as well as smaller plasma systems for surface modifications.
EDF PPSxxxRC RF generators with integrated matchbox
BeamTec presents the innovative PPS RF series: A compact 2-in-1 system that combines a 13.56 MHz RF generator and automatic matchbox in a single 19″ housing. Despite integrating the matchbox into the 19″ housing, a sputter source with a 4m cable length can be matched within 2 seconds.
Key Features
- Matchbox and generator in single 19″, 3 U unit
- 300 W or 600 W generator, 13.56 MHz; air-cooled
- Pulsing feature up to 30 kHz with fully adjustable duty cycle for flexible applications
- Fully digital, precise tuning in <2 s, AGC for stable output power
- Precise measurement of forward power, reflected power and load impedance
- Control: Local, IO, RS485 (Modbus), RJ45 (web browser)
- Optional: Separate RF supply (2U) and matchbox
- Assembly and CE testing in Europe
About EDF electronics sp. z o.o.
EDF electronics is our Polish partner, developer, and manufacturer of innovative plasma power supplies in the lower power range, as well as quartz monitors for thin-film technology.
Specifications
 |  | |
|
|---|---|---|---|
BDS-HF-xxx AFP | BT-PPS300RC | BT-PPS600RC |
|
| Output power | 200 W, 300 W, 750 W | 300 W | 600 W |
| Matchbox | BDS-AMN750 | integrated | integrated |
| Frequency | 13,56 MHz | 13,56 MHz | 13,56 MHz |
| Pulsing option | - | 100 Hz - 30 kHz | 100 Hz - 30 kHz |
| User interface | Touch Screen Display with Encoder | Touch Screen Display with Encoder | Touch Screen Display with Encoder |
| Outputs | N-Socket | DIN 7/16 | DIN 7/16 |
| Interfaces | digital/analog IO, RS232, Profibus optional | digital/analog IO, RS485, Ethernet | digital/analog IO, RS485, Ethernet |
| Main supply | 1x 230 VAC | 1x 230 VAC | 1x 230 VAC |
| Dimensions | 1/2 19" x 3 U, 410 mm depth | 19" x 3 U, 435 mm depth | 19" x 3 U, 500 mm depth |