Electron beam evaporators
for vacuum coatings
Ion Sources
for surface modifications in vacuum processes
Rotary Vacuum Feedthroughs
Ferrofluid-sealed or magnetically coupled
Plasma Power Supplies
DC, MF and RF Supplies
Vacuum Measurement
Vacuum sensors and controllers
Thin Film Measurement
utilizing quartz crystals
Coating Support
for PVD processes
Spare Parts & Consumables
Crucible Liners, quartzes, spare parts and more
Product News
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News and Exhibitions
Structural Work Completed
Structural Work Completed of the new company building in Science Park III / Ulm As planned, the shell of the new company building could be completed and winterized before Christmas. Thus dry construction work can start immediately in the new year. The move to the new premises will take place in April / May 2016.