Features | |
Ion Source Gas Controller & Process Sequencer |
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BeamTec presents the new line of gas controllers by Kaufman & Robinson Inc. Auto Controller AC1000 This Autocontroller incorporates gas control for 4 analog MFCs along with process sequencing for both gridded and gridless ion sources. It communictates with the corresponding power supplies and provides control of 4 independent recipes for each operating mode (auto gas / manual gas/ gas only).
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| AC1000 Auto Controller |
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| Gas Channels |
4 |
| Process Sequencing |
yes |
| Process Memory |
4 processes for each operating mode (auto gas / manual gas / gas only) |
| Gas Regulation Modes |
fixed gas conditional current @ regulated gas conditional voltage @ regulated gas |
| Host Interface |
analog / RS232 / RS485 / MARK II |
| Power Supply Communication Interface |
DC30010 / DC3005 / DC25020/ FC1206 / FC1200 / BC12015 / BC12025 / KC8002 / KSC1202 / KSC1210 |
| Input |
1x100-250VAC, 50/60Hz |
| Dimensions |
19", 1U |
| Weight |
2 kg |