Multi Pocket Electron Beam Evaporators

BeamTec provides a full line of electron beam evaporators for thin film deposition applications. The product range includes evaporators for both production oriented metallization processes and optical deposition applications.

  

BeamTec Evaporators

EB M-6
This unit is designed for optical deposition applications requiring different materials. High sweep frequency capability and excellent beam spot control makes this source ideal for optical material evaporation in medium sized vacuum chambers. An integrated vacuum compatible stepper motor drive enables free positioning of the source within the chamber.

 

EB M-8 / EB M-10
This unit is designed optical deposition applications requiring different materials. High sweep frequency capability and excellent beam spot control makes this source ideal for optical material evaporation in large vacuum chambers. An integrated vacuum compatible stepper motor drive enables free positioning of the source within the chamber.

 
Features Benefits
  • low-inductance magnet coil system
supports high sweep frequencies
  • small beam spot regardless of position in pocket
excellent control of beam positioning
  • atmospheric motor drive with digital encoder
exact positioning of pocket; no dynamic- water- vacuum interface
prevents shorting out of filament ; long filament life

Please ask for a copy of our brochure "Multi Hearth Evaporators" at info@beamtec.de .

Electron Beam Sources Brochure

EB-5 Single Hearth

EB-3
This unit is designed for production oriented metallization deposition applications requiring different materials. With a maximum hearth capacity of 4 x 25cm³ and 10 kW max. operating power the source supports long process runs at high evaporation rates.

EB-2 Multi Hearth

EB-2
This unit is designed for production oriented metallization deposition applications requiring different materials. With a maximum hearth capacity of 4 x 40cm³ and 10 kW max. operating power the source supports long process runs at high evaporation rates.

Features Benefits
  • efficient water flow
allows for high operating power
  • hermetically sealed magnet housing with non-interchangeable connectors
easy installation with excellent vacuum compatibility
  • self-contained deflection assembly
 no need to regauss egun
  • Industry compatible dimensions / interfacing
ideal for TELEMARK / TEMESCAL replacements

SPECIFICATIONS
 
EB-3
EB M-6
EB M-10
Max. Operating Power
10 kW
10 kW
6 kW
10 kW
High Voltage Range
6-10 kV
5-10 kV
5-10 kV
5-10 kV
Max. Emission Current:
1000 mA @ 10kV
1000 mA @ 10kV
600 mA @ 10kV
1000 mA @ 10kV
Max. Filament Power:
600 W
600 W
600 W
600 W
Magnet Deflection Current:
+/- 1A
+/- 1A
+/- 3A
+/- 3A
Motor Drive:
optional side or bottom drive
optional side or bottom drive
high-torque motor w. built-in encoder and absolute positioning; jamming protection
Standard Crucible Volumes:
4 x 25 cm³
6 x 7 / 15 cm³
4 x 40 cm³
6 x 7/15/25 cm³
1 x 325 cm³
4 x 8 cm³
6 x 4 cm³
8 x 2 cm³
4 x 60 cm³,
6 x 40 cm³
8 x 20 cm³
Dimensions (vacuum component) :
10.9 cm H x 15.5 cm W x 25.7 cm L
10.9 cm H x 20.52 cm W x 33.15 cm L
10.9 cm H x 11.2 cm W x 23.5 cm L
10.9cm H x 19.0 cm W x 32.9cm L
Weight:
18 kg
21 kg
14 kg
18 kg