BeamTec GmbH is a company specialized in electron and ion beam products and related components. BeamTec represents various manufacturers with high innovation potential and reliable products. Our customers can profit from extensive market knowledge and competence in supplying leading edge products.

ion beam source, end hall, electron beam, evaporator, high voltage, e-gun, guns, thin-film, hochspannung, elektronenstrahl, verdampfung, elektronenstrahlverdampfer, liner, filamente, crucibles, power supply, Sales and service company for vacuum and thin-film industry.Provides electron beam evaporators, quartz, quartz, quarze, QCM, crystal microbalance, high-voltage power supplies and related products, primary switched, fast arc management, alimentations haute tension, Évaporateur à faisceau d'électrons, KRI, Kaufman & Robinson, Ferrotec, Maxtek, Telemark, PST, MDC, Temescal, Tiegel, Heizwendel, Graphite, Grafit, controller, primär getaktete Hochspannungsversorgung, Schnittstellen, interface, Vertrieb, Filderstadt Germany Deutschland, Ferrofluidics, Magnetflüssigkeit, ferrofluid, Dichtung, Rotary Drive Feedthrough, magnetically sealed feedthrough, hermetic seal, liquid
   
 

Ion Beam Sources by Kaufman & Robinson Inc.

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BeamTec GmbH - RF ICP Plasma Sources

RF ICP Ion Sources

BeamTec presents the new RF ICP ion source by Kaufman & Robinson Inc.
With this new line KRI expands its product range for applications requiring higher ion energies. Typical applications include

  • Ion beam etching and milling
  • Ion beam assist deposition
  • Ion beam sputter deposition
  • Plasma surface modification and texturing
  • Direct deposition of thin and hard coatings

RF ICP Plasma Source

© KRI 2007

RF ICP Versions

 

RF ICP 20cm gridded ion beam source Features
  • Inductively coupled / RF discharge
  • Optlin self aligning ion optics
  • Filamentless
  • Gas compatibility with Ar, Kr, Xe, O2, N2, H2,others
  • Beam Type: collimated, convergent, divergent
  • Low ion energy option without grids

 
 
RFICP40
RFICP100
RFICP140
RFICP200
RFICP300
Ion Beam Current
>100mA
>350mA
>600mA
>800mA
>1500mA
Beam Voltage
100 - 1200 V
100 - 1200 V
100 - 1200 V
100 - 1200 V
100 - 1200 V
Beam Size @ grid
4cm Φ
10cm Φ
14cm Φ
20cm Φ
30cm Φ
Gas Flow
3-10 sccm
5-30 sccm
5-30 sccm
10-40 sccm
15-50 sccm
Diameter
5.3” (13.5cm)
7.52” (19.1cm)
9.7” (24.6cm)
16.1” (41cm)
20.9” (53cm)
Height
5.0” (12.7cm)
9.25” (23.5cm)
9.7” (24.6cm)
11.8” (30cm)
14” (35cm)

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