Ion Beam Sources by Kaufman & Robinson Inc.

BeamTec presents a modern retrofit package for Veeco‘s MARK III HO end-Hall ion source power supply with hollow cathode neutralizer. The package comprises the new modular Kaufman & Robinson power supply system including a discharge, bias, keeper and gas controller with built-in process sequencer and an integrated 37pin MARK III compatible interface.

All controllers feature advanced primary switched power modules with fast arc handling for stable operation over the complete operating range. The controllers can power both the traditional MARK II / Mark III ion sources or the next generation eH series of KRI products.

Four operating modes including the constant current and constant voltage mode with either constant gas or gas feedback allow for maximum versatility and fast response times on changing plasma loads. In AUTOSEQUENCE Mode the hollow cathode starts automatically before the anode is switched on.