Ion Beam Sources by Kaufman & Robinson Inc.

BeamTec presents a modern retrofit package for Veeco‘s MARK II end-Hall ion source power supply. The package comprises the new modular Kaufman & Robinson power supply system including a filament, discharge and gas controller with built-in process sequencer and an integrated MARK II compatible interface. Hollow cathode versions are supported as well by utilizing Bias and Keeper controllers instead of a filament controller.

All controllers feature advanced primary switched power modules with fast arc handling for stable operation over the complete operating range. The controllers can power both the traditional MARK II ion source or the next generation eH series of KRI products.

Four operating modes including the constant current and constant voltage mode with either constant gas or gas feedback allow for maximum versatility and fast response times on changing plasma loads. Stable process conditions are achieved within 5-10s after RUN command.