The COLT quartz crystal sensor is a unique thin film sensor for 12 industry standard 14 mm/ 0.550″ diameter quartzes or 24 compact 8.6 mm quartzes. The built-in stepper motor allows for fast and direct positioning with reference position feedback from standard controllers. The compact sensor head with 102 mm OD can be installed inside a vacuum chamber in any orientation and features a NW16 utility port for water and electrical supply .
In addition the model COLT10-PRO incorporates an actively cooled revolving quartz carousel which holds up 10 standard 14 mm quartzes. Whereas other revolving type sensors only provide cooling of the static sensor housing the model COLT10-PRO maintains the rotary crystal head itself and motor at optimum operating temperature range for reproducible thin film measurement The compact 88 mm OD enclosure allows for integration in a 90mm ID hollow shaft substrate drive system with all utilities exiting on the rear side.
An optionally available swing shutter provides shuttering for the active crystal aperture on all COLT models for extended process runs and sample&hold measurement technique. It‘s pneumatic actuator gas line is also fed via the single NW16 port.
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BeamTec provides a new kind of evaporation source for high rate deposition – the Magnetron Evaporator. This technology has a combination of benefits of thermal evaporation and magnetron sputtering