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rf combo supply

BeamTec presents the innovative MPS RF series: A compact 2-in-1 system that combines a 13.56 MHz RF generator and automatic matchbox in a single 19″ housing. Despite integrating the matchbox into the 19″ housing, a sputter source with a 4m cable length can be matched within 2 seconds.

Key Features
  • Matchbox and generator in single 19″, 3 U unit
  • 300 W or 600 W generator, 13.56 MHz; air-cooled
  • Pulsing feature up to 30 kHz with fully adjustable duty cycle for flexible applications
  • Fully digital, precise tuning in <2 s, AGC for stable output power
  • Precise measurement for output power, reflected power and load impedance
  • Control: Local, IO, RS485 (Modbus), RJ45 (web browser)
  • Optional: Separate RF supply (2 U) and matchbox
  • Assembly and CE testing in Europe