{"id":4450,"date":"2019-01-11T14:09:35","date_gmt":"2019-01-11T13:09:35","guid":{"rendered":"https:\/\/shop.beamtec.de\/wpl\/uhv-verdampfer\/"},"modified":"2021-01-19T15:22:21","modified_gmt":"2021-01-19T14:22:21","slug":"uhv-evaporators","status":"publish","type":"page","link":"https:\/\/www.beamtec.de\/en\/uhv-evaporators\/","title":{"rendered":"UHV Evaporators"},"content":{"rendered":"
[et_pb_section fb_built=”1″ _builder_version=”3.22.3″ background_color=”#f7f7f7″ max_width_tablet=”” max_width_phone=”100%” max_width_last_edited=”on|desktop” custom_margin=”|||0px” custom_padding=”0px||10px” saved_tabs=”all”][et_pb_row use_custom_gutter=”on” gutter_width=”1″ custom_padding_last_edited=”on|desktop” padding_top_bottom_link_1=”true” module_class=” et_pb_row_fullwidth” _builder_version=”3.25″ background_image=”https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/01\/Mehrtiegelverdampfer-blur-2.png” width=”100%” width_tablet=”100%” width_phone=”” width_last_edited=”on|desktop” max_width=”100%” max_width_tablet=”100%” max_width_phone=”” max_width_last_edited=”on|desktop” module_alignment=”center” custom_margin=”|||” custom_padding=”60px||60px|0px|true” custom_padding_tablet=”” custom_padding_phone=”” make_fullwidth=”on” custom_width_px=”2600px”][et_pb_column type=”4_4″ _builder_version=”3.25″ custom_padding=”0px||0px|0px” custom_padding__hover=”|||”][et_pb_blurb title=”Electron Beam Evaporators” content_max_width=”718px” _builder_version=”3.18.4″ header_level=”h1″ header_font=”||||||||” header_text_align=”center” header_text_color=”#fe871f” header_font_size=”59px” body_font=”||||||||” body_text_align=”center” body_text_color=”#ffffff” body_font_size=”30px” custom_margin=”34px||” custom_padding=”25px||25px||true” custom_padding_tablet=”0px||0px|” custom_padding_phone=”0px||0px|” custom_padding_last_edited=”on|desktop” header_font_size_tablet=”37px” header_font_size_phone=”25px” header_font_size_last_edited=”on|tablet” body_font_size_tablet=”25px” body_font_size_phone=”20px” body_font_size_last_edited=”on|phone”]<\/p>\n
UHV Evaporators<\/p>\n
[\/et_pb_blurb][\/et_pb_column][\/et_pb_row][\/et_pb_section][et_pb_section fb_built=”1″ _builder_version=”3.22.3″ background_color=”#f7f7f7f7″ custom_padding=”0px||10px”][et_pb_row _builder_version=”3.25″ custom_padding=”0px||”][et_pb_column type=”4_4″ _builder_version=”3.25″ custom_padding=”|||” custom_padding__hover=”|||”][et_pb_text _builder_version=”3.27.4″ text_font=”||||||||”]<\/p>\n
Home<\/a> \u00bb Electron Beam Evaporators<\/a> \u00bb UHV Evaporators<\/p>\n [\/et_pb_text][\/et_pb_column][\/et_pb_row][et_pb_row _builder_version=”3.25″ custom_padding=”||10px”][et_pb_column type=”4_4″ _builder_version=”3.25″ custom_padding=”|||” custom_padding__hover=”|||”][et_pb_text _builder_version=”3.27.4″ text_font=”||||||||”]<\/p>\n BeamTec provides UHV evaporators with a variety of crucible volumes and power classes. Only UHV compatible components are used in the design for this kind of evaporators.<\/p>\n [\/et_pb_text][\/et_pb_column][\/et_pb_row][\/et_pb_section][et_pb_section fb_built=”1″ specialty=”on” padding_top_1=”0px” padding_top_2=”0px” padding_right_1=”0px” padding_bottom_1=”0px” padding_bottom_2=”0px” padding_left_1=”0px” _builder_version=”3.22.3″ background_color=”#f7f7f7″ custom_margin=”0px|0px|0px|0px” custom_padding=”0px|0px|35px|0px|false|false”][et_pb_column type=”1_4″ _builder_version=”3.25″ custom_padding=”|||” padding_bottom__hover=”0px” padding_left__hover=”0px” padding_right__hover=”0px” padding_top__hover=”0px” parallax__hover=”off” parallax_method__hover=”on” custom_padding__hover=”|||”][et_pb_image src=”https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/01\/EB1-Nano.png” align=”center” align_tablet=”center” align_last_edited=”on|desktop” _builder_version=”3.23″ max_width=”27%”][\/et_pb_image][\/et_pb_column][et_pb_column type=”3_4″ specialty_columns=”3″ _builder_version=”3.25″ custom_padding=”|||” padding_bottom__hover=”0px” padding_top__hover=”0px” parallax__hover=”off” parallax_method__hover=”on” custom_padding__hover=”|||”][et_pb_row_inner _builder_version=”3.25″ custom_margin=”||0px” custom_padding=”0px||0px”][et_pb_column_inner saved_specialty_column_type=”3_4″ _builder_version=”3.25″ custom_padding=”|||” parallax__hover=”off” parallax_method__hover=”on” custom_padding__hover=”|||”][et_pb_text _builder_version=”3.27.4″ text_font=”||||||||” header_font=”||||||||” header_2_font=”||||||||” header_3_font=”||||||||”]<\/p>\n The small 4kW evaporator with max. 4 cm\u00b3 crucible volume is equipped with a permanent magnet system for the primary deflection as well as an electromagnetic coil system for the two-dimensional, dynamic deflection of the electron beam. The ISO63CF mounting flange incorporates all media feedthroughs like high voltage, magnet current and water.<\/p>\n [\/et_pb_text][\/et_pb_column_inner][\/et_pb_row_inner][et_pb_row_inner _builder_version=”3.25″ column_structure=”1_2,1_2″][et_pb_column_inner type=”1_2″ saved_specialty_column_type=”3_4″ _builder_version=”3.25″ custom_padding=”|||” parallax__hover=”off” parallax_method__hover=”on” custom_padding__hover=”|||”][et_pb_text _builder_version=”3.27.4″]<\/p>\n Max. Operating power<\/strong> 4 kW [\/et_pb_text][\/et_pb_column_inner][et_pb_column_inner type=”1_2″ saved_specialty_column_type=”3_4″ _builder_version=”3.25″ custom_padding=”|||” parallax__hover=”off” parallax_method__hover=”on” custom_padding__hover=”|||”][et_pb_text _builder_version=”3.27.4″]<\/p>\n Crucible volume<\/strong> [\/et_pb_text][\/et_pb_column_inner][\/et_pb_row_inner][\/et_pb_column][\/et_pb_section][et_pb_section fb_built=”1″ specialty=”on” padding_top_1=”0px” padding_top_2=”0px” padding_right_1=”0px” padding_bottom_1=”0px” padding_bottom_2=”0px” padding_left_1=”0px” _builder_version=”3.22.3″ background_color=”#f7f7f7″ custom_margin=”0px|0px|0px|0px” custom_padding=”0px|0px|35px|0px|false|false”][et_pb_column type=”1_4″ _builder_version=”3.25″ custom_padding=”|||” padding_bottom__hover=”0px” padding_left__hover=”0px” padding_right__hover=”0px” padding_top__hover=”0px” parallax__hover=”off” parallax_method__hover=”on” custom_padding__hover=”|||”][et_pb_image src=”https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/01\/EBS6-UHV.gif” align_tablet=”center” align_last_edited=”on|desktop” _builder_version=”3.23″ max_width_last_edited=”off|desktop” module_alignment=”left” custom_padding=”30px||30px||true” max_width__hover=”100%”][\/et_pb_image][\/et_pb_column][et_pb_column type=”3_4″ specialty_columns=”3″ _builder_version=”3.25″ custom_padding=”|||” padding_bottom__hover=”0px” padding_top__hover=”0px” parallax__hover=”off” parallax_method__hover=”on” custom_padding__hover=”|||”][et_pb_row_inner _builder_version=”3.25″ custom_margin=”||0px” custom_padding=”0px||0px”][et_pb_column_inner saved_specialty_column_type=”3_4″ _builder_version=”3.25″ custom_padding=”|||” parallax__hover=”off” parallax_method__hover=”on” custom_padding__hover=”|||”][et_pb_text _builder_version=”3.27.4″ text_font=”||||||||” header_font=”||||||||” header_2_font=”||||||||”]<\/p>\n The small evaporator is availble for pocket sizes 4, 7 and 15 cm\u00b3. With a rated power of 6 kW this unit can operate in a wide range of applications.<\/p>\n [\/et_pb_text][\/et_pb_column_inner][\/et_pb_row_inner][et_pb_row_inner _builder_version=”3.25″ column_structure=”1_2,1_2″][et_pb_column_inner type=”1_2″ saved_specialty_column_type=”3_4″ _builder_version=”3.25″ custom_padding=”|||” parallax__hover=”off” parallax_method__hover=”on” custom_padding__hover=”|||”][et_pb_text _builder_version=”3.27.4″]<\/p>\n Max. Operating power<\/strong> 6 kW [\/et_pb_text][\/et_pb_column_inner][et_pb_column_inner type=”1_2″ saved_specialty_column_type=”3_4″ _builder_version=”3.25″ custom_padding=”|||” parallax__hover=”off” parallax_method__hover=”on” custom_padding__hover=”|||”][et_pb_text _builder_version=”3.27.4″]<\/p>\n Typical Crucible volume<\/strong> [\/et_pb_text][\/et_pb_column_inner][\/et_pb_row_inner][\/et_pb_column][\/et_pb_section][et_pb_section fb_built=”1″ specialty=”on” padding_top_1=”0px” padding_top_2=”0px” padding_right_1=”0px” padding_bottom_1=”0px” padding_bottom_2=”0px” padding_left_1=”0px” _builder_version=”3.22.3″ background_color=”#f7f7f7″ custom_margin=”0px|0px|0px|0px” custom_padding=”0px|0px|35px|0px|false|false”][et_pb_column type=”1_4″ _builder_version=”3.25″ custom_padding=”|||” padding_bottom__hover=”0px” padding_left__hover=”0px” padding_right__hover=”0px” padding_top__hover=”0px” parallax__hover=”off” parallax_method__hover=”on” custom_padding__hover=”|||”][et_pb_image src=”https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/01\/EBS15-UHV.gif” align=”center” align_tablet=”center” align_last_edited=”on|desktop” _builder_version=”3.23″ module_alignment=”left” custom_padding=”30px||30px||true” max_width__hover=”100%”][\/et_pb_image][\/et_pb_column][et_pb_column type=”3_4″ specialty_columns=”3″ _builder_version=”3.25″ custom_padding=”|||” padding_bottom__hover=”0px” padding_top__hover=”0px” parallax__hover=”off” parallax_method__hover=”on” custom_padding__hover=”|||”][et_pb_row_inner _builder_version=”3.25″ custom_margin=”||0px” custom_padding=”0px||0px”][et_pb_column_inner saved_specialty_column_type=”3_4″ _builder_version=”3.25″ custom_padding=”|||” parallax__hover=”off” parallax_method__hover=”on” custom_padding__hover=”|||”][et_pb_text _builder_version=”3.27.4″ text_font=”||||||||” header_font=”||||||||” header_2_font=”||||||||”]<\/p>\n The large evaporator can be equipped with a maximum pocket volume of 100 cm\u00b3. With an operating power of up to 15 kW it is specialized for the use in metallization system or applications which require large capacity of the evaporant.<\/p>\n [\/et_pb_text][\/et_pb_column_inner][\/et_pb_row_inner][et_pb_row_inner _builder_version=”3.25″ column_structure=”1_2,1_2″][et_pb_column_inner type=”1_2″ saved_specialty_column_type=”3_4″ _builder_version=”3.25″ custom_padding=”|||” parallax__hover=”off” parallax_method__hover=”on” custom_padding__hover=”|||”][et_pb_text _builder_version=”3.27.4″]<\/p>\n Max. Operating power<\/strong> 15 kW [\/et_pb_text][\/et_pb_column_inner][et_pb_column_inner type=”1_2″ saved_specialty_column_type=”3_4″ _builder_version=”3.25″ custom_padding=”|||” parallax__hover=”off” parallax_method__hover=”on” custom_padding__hover=”|||”][et_pb_text _builder_version=”3.27.4″]<\/p>\n Typical crucible volume<\/strong> [\/et_pb_text][\/et_pb_column_inner][\/et_pb_row_inner][\/et_pb_column][\/et_pb_section][et_pb_section fb_built=”1″ specialty=”on” padding_top_1=”0px” padding_top_2=”0px” padding_right_1=”0px” padding_bottom_1=”0px” padding_bottom_2=”0px” padding_left_1=”0px” _builder_version=”3.22.3″ background_color=”#f7f7f7″ custom_margin=”0px|0px|0px|0px” custom_padding=”0px|0px|0|0px|false|false”][et_pb_column type=”1_4″ _builder_version=”3.25″ custom_padding=”|||” padding_bottom__hover=”0px” padding_left__hover=”0px” padding_right__hover=”0px” padding_top__hover=”0px” parallax__hover=”off” parallax_method__hover=”on” custom_padding__hover=”|||”][et_pb_image src=”https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/01\/EBL6-UHV.gif” align=”center” align_tablet=”center” align_last_edited=”on|desktop” _builder_version=”3.23″ custom_padding=”30px||30px||true” max_width__hover=”100%”][\/et_pb_image][\/et_pb_column][et_pb_column type=”3_4″ specialty_columns=”3″ _builder_version=”3.25″ custom_padding=”|||” padding_bottom__hover=”0px” padding_top__hover=”0px” parallax__hover=”off” parallax_method__hover=”on” custom_padding__hover=”|||”][et_pb_row_inner _builder_version=”3.25″ custom_margin=”||0px” custom_padding=”0px||0px”][et_pb_column_inner saved_specialty_column_type=”3_4″ _builder_version=”3.25″ custom_padding=”|||” parallax__hover=”off” parallax_method__hover=”on” custom_padding__hover=”|||”][et_pb_text _builder_version=”3.27.4″ text_font=”||||||||” header_font=”||||||||” header_2_font=”||||||||”]<\/p>\n The linear UHV multi hearth evaporator EBL6-UHV enables evaporation of up to 6 different materials without breaking vacuum. All utilites are installed on a horizontally mounted ISO160CF flange.<\/p>\n [\/et_pb_text][\/et_pb_column_inner][\/et_pb_row_inner][et_pb_row_inner _builder_version=”3.25″ column_structure=”1_2,1_2″][et_pb_column_inner type=”1_2″ saved_specialty_column_type=”3_4″ _builder_version=”3.25″ custom_padding=”|||” parallax__hover=”off” parallax_method__hover=”on” custom_padding__hover=”|||”][et_pb_text _builder_version=”3.27.4″]<\/p>\n Max. Operating power<\/strong> 6 kW [\/et_pb_text][\/et_pb_column_inner][et_pb_column_inner type=”1_2″ saved_specialty_column_type=”3_4″ _builder_version=”3.25″ custom_padding=”|||” parallax__hover=”off” parallax_method__hover=”on” custom_padding__hover=”|||”][et_pb_text _builder_version=”3.27.4″]Pocket rotation<\/strong> manual\/(motorized optional) [\/et_pb_tab][et_pb_tab title=”Downloads” _builder_version=”3.19.12″]<\/p>\nSmall Single Hearth Evaporator<\/span>EB1Nano-UHV<\/span><\/h2>\n
High voltage range<\/strong> 6-8 kV
Coil deflection current (x\/y)<\/strong> +\/-2 A
Mounting<\/strong> ISO63K or ISO63CF<\/p>\n
1 x 4 cm\u00b3<\/p>\nSingle Hearth Evaporator EBS6-xx-UHV<\/span><\/h2>\n
High voltage range<\/strong> 5 – 10 kV
Coil deflection current (x\/y)<\/strong> +\/- 1 A
Mounting<\/strong>optional on CFF<\/p>\n
1 x 4 cm\u00b3 (-04)
1 x 7 cm\u00b3 (-07)
1 x 15 cm\u00b3 (-15)<\/p>\nSingle Hearth Evaporator EBS15-xxx-UHV<\/h2>\n
High voltage range<\/strong> 5 – 10 kV
Coil deflection current (x\/y)<\/strong> +\/- 1 A
Mounting<\/strong>optional on CFF
<\/strong><\/p>\n
1 x 25 cm\u00b3 (-025)
1 x 40 cm\u00b3 (-040)
1 x 100 cm\u00b3 (-100)<\/p>\nMulti Hearth Evaporator <\/span>EBL6-xxx-UHV<\/span><\/h2>\n
High voltage range<\/strong> 5 – 10 kV
Coil deflection current (x\/y)<\/strong> +\/- 1 A
Mounting <\/strong>ISO160CF \/ ISO200CF incl. HV-, magnet,- <\/span>water- and shutter-feedthrough
<\/strong><\/p>\n
\nTypical crucible volume<\/strong>
\n5 x 4 cm\u00b3 (-504) 7 x 4 cm\u00b3 (-704)
\n4 x 7 cm\u00b3 (-407) 6 x 7 cm\u00b3 (-607)
\n3 x 15 cm\u00b3 (-315) 4 x 15 cm\u00b3 (-415)[\/et_pb_text][\/et_pb_column_inner][\/et_pb_row_inner][\/et_pb_column][\/et_pb_section][et_pb_section fb_built=”1″ _builder_version=”3.22.3″ background_color=”#f7f7f7″ custom_margin=”0px||0px” custom_padding=”0px||0px”][et_pb_row _builder_version=”3.25″][et_pb_column type=”4_4″ _builder_version=”3.25″ custom_padding=”|||” custom_padding__hover=”|||”][et_pb_tabs _builder_version=”4.8.1″ tab_text_color=”#fe871f” tab_font=”||||||||” tab_font_size=”16px” hover_enabled=”0″ sticky_enabled=”0″][et_pb_tab title=”Models in comparison” _builder_version=”4.8.1″ hover_enabled=”0″ sticky_enabled=”0″]<\/p>\n\n\n
\n\t \n<\/th> EB1Nano-UHV<\/th> EBS6-xx-UHV<\/th> EBS15-xxx-UHV<\/th> EBL6-xxx-UHV<\/th>\n<\/tr>\n<\/thead>\n \n\t <\/td> <\/td> <\/td> <\/td> <\/td> <\/td>\n<\/tr>\n \n\t Max. operating power<\/td> 4 kW<\/td> 6 kW<\/td> 15 kW<\/td> 6 kW<\/td>\n<\/tr>\n \n\t High voltage range<\/td> 6 - 8 kW<\/td> 5 - 10 kV<\/td>\n<\/tr>\n \n\t Coil deflection current (x\/y)<\/td> \u00b1 2 A<\/td> \u00b1 1 A<\/td>\n<\/tr>\n \n\t Mounting<\/td> ISO63K or ISO63CF<\/td> optional on CFF<\/td> optional on CFF<\/td> ISO160CF \/ ISO200CF incl. HV-, Magnet,-
\nWater- and Shutter-Feedthrough<\/td>\n<\/tr>\n\n\t Pocket rotation<\/td> -<\/td> -<\/td> -<\/td> manual \/ (motorized optional)<\/td>\n<\/tr>\n \n\t Typ. crucible volume<\/td> 1 x 4 cm\u00b3<\/td> 1 x 4 cm\u00b3 (-04)
\n1 x 7 cm\u00b3 (-07)
\n1 x 15 cm\u00b3 (-15)<\/td>1 x 25 cm\u00b3 (-025)
\n1 x 40 cm\u00b3 (-040)
\n1 x 100 cm\u00b3 (-100)<\/td>5 x 4 cm\u00b3 (-504)
\n4 x 7 cm\u00b3 (-407)
\n3 x 15 cm\u00b3 (-315)<\/td>7 x 4 cm\u00b3 (-704)
\n6 x 7 cm\u00b3 (-607)
\n4 x 15 cm\u00b3 (-415)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n\n<\/div>\n