{"id":4438,"date":"2019-01-31T14:50:07","date_gmt":"2019-01-31T13:50:07","guid":{"rendered":"https:\/\/shop.beamtec.de\/wpl\/rficp-ionenquellen\/"},"modified":"2021-01-19T15:28:18","modified_gmt":"2021-01-19T14:28:18","slug":"rficp-ion-sources","status":"publish","type":"page","link":"https:\/\/www.beamtec.de\/en\/rficp-ion-sources\/","title":{"rendered":"RFICP Ion Sources"},"content":{"rendered":"
[et_pb_section fb_built=”1″ _builder_version=”3.22″ background_color=”#f7f7f7″ max_width_tablet=”” max_width_phone=”100%” max_width_last_edited=”on|desktop” custom_margin=”|||0px” custom_padding=”0px||10px” saved_tabs=”all”][et_pb_row use_custom_gutter=”on” gutter_width=”1″ custom_padding_last_edited=”on|desktop” padding_top_bottom_link_1=”true” module_class=” et_pb_row_fullwidth” _builder_version=”3.25″ background_image=”https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/01\/rficp-blur.jpg” width=”100%” width_tablet=”100%” width_last_edited=”on|desktop” max_width=”100%” max_width_tablet=”100%” max_width_last_edited=”on|desktop” module_alignment=”center” custom_margin=”|||” custom_padding=”60px||60px|0px|true” custom_padding_tablet=”” custom_padding_phone=”” make_fullwidth=”on” custom_width_px=”2600px”][et_pb_column type=”4_4″ _builder_version=”3.25″ custom_padding=”0px||0px|0px” custom_padding__hover=”|||”][et_pb_blurb title=”Ion Sources” content_max_width=”718px” _builder_version=”3.19.9″ header_level=”h1″ header_font=”||||||||” header_text_align=”center” header_text_color=”#fe871f” header_font_size=”59px” body_font=”||||||||” body_text_align=”center” body_text_color=”#ffffff” body_font_size=”30px” custom_margin=”34px||” custom_padding=”25px||25px||true” custom_padding_tablet=”0px||0px|” custom_padding_phone=”0px||0px|” custom_padding_last_edited=”on|desktop” header_font_size_tablet=”37px” header_font_size_phone=”25px” header_font_size_last_edited=”on|tablet” body_font_size_tablet=”25px” body_font_size_phone=”20px” body_font_size_last_edited=”on|phone”]<\/p>\n
RFICP Ion Sources<\/p>\n
[\/et_pb_blurb][\/et_pb_column][\/et_pb_row][et_pb_row _builder_version=”3.25″ custom_padding=”0|0px|27px|0px|false|false”][et_pb_column type=”4_4″ _builder_version=”3.25″ custom_padding=”|||” custom_padding__hover=”|||”][et_pb_text _builder_version=”3.27.4″]<\/p>\n
Home<\/a> \u00bb Ion Sources<\/a>\u00bb RFICP Ion Sources<\/p>\n [\/et_pb_text][\/et_pb_column][\/et_pb_row][\/et_pb_section][et_pb_section fb_built=”1″ _builder_version=”3.22″ background_color=”#f7f7f7″ custom_padding=”0|0px|0|0px|false|false”][et_pb_row _builder_version=”3.25″ custom_padding=”27px|0px|0|0px|false|false” column_structure=”2_3,1_3″][et_pb_column type=”2_3″ _builder_version=”3.25″ custom_padding=”|||” custom_padding__hover=”|||”][et_pb_text _builder_version=”3.27.4″]<\/p>\n The RFICP ion sources produce a high density discharge without the use of filaments. The beam extracted from the discharge is precisely controlled to provide a defined shape, current density and ion energy.<\/p>\n BeamTec provides a complete product line of radio frequency, inductive coupled plasma (RFICP) gridded ion source products. The RFICP products incorporate most innovative gridded source technology. Advancements such as the RF filament-less plasma discharge and self-aligned ion optics are proven benefits. Without a filament in the plasma discharge chamber, the RFICP products are suited to operation where reactive gas discharges and long process runs are critical.<\/p>\n The RFICP products come in a comprehensive product package. The package is complete with components required to install and operate the RFICP products, including the RF inductively coupled RFICP ion source, application-specific ion optics, electron source neutralizer, power supply controller, vacuum feedthroughs, and cables.<\/p>\n Our RFICP products are used across the globe in world class research and industrial fabrication of optical, photonics, magnetic and microelectronic devices. The RFICP packages are configurable to suit installation platforms. These configurations can be integrated into numerous vacuum process platforms, including small multi-purpose R&D systems, dedicated planetary motion deposition or etching systems, box coaters, single wafer load-lock cluster tools, and low profile sputtering systems coaters.<\/p>\n The RFICP products are applied in standard and emerging material processes. The ability to produce and control ion species with specific energy, chemical reactivity, current density, and trajectory makes the RFICP products effective tools to engineer precision films and surfaces. Whether its densification, optical transmission, critical thickness uniformity, smooth interfaces, improved adhesion, or vertical sidewalls, the RFICP products are responsible for yielding beneficial material properties.<\/p>\n [\/et_pb_text][\/et_pb_column][et_pb_column type=”1_3″ _builder_version=”3.25″ custom_padding=”|||” custom_padding__hover=”|||”][et_pb_text _builder_version=”3.27.4″]<\/p>\n [\/et_pb_text][et_pb_image src=”https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/01\/RFICP140.png” align=”center” align_tablet=”center” align_last_edited=”on|desktop” _builder_version=”3.23″][\/et_pb_image][et_pb_image src=”https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/02\/RFICP-plasma.jpg” align=”center” align_tablet=”center” align_last_edited=”on|desktop” _builder_version=”3.23″ max_width=”75%” max_width_tablet=”50%” max_width_phone=”60%” max_width_last_edited=”on|tablet”][\/et_pb_image][\/et_pb_column][\/et_pb_row][et_pb_row _builder_version=”3.25″ custom_padding=”27px|0px|0|0px|false|false”][et_pb_column type=”4_4″ _builder_version=”3.25″ custom_padding=”|||” custom_padding__hover=”|||”][et_pb_text _builder_version=”3.27.4″]<\/p>\n Commonly, the RFICP products are applied in the following vacuum processes: [\/et_pb_text][\/et_pb_column][\/et_pb_row][\/et_pb_section][et_pb_section fb_built=”1″ _builder_version=”3.22″ background_color=”#f7f7f7″ custom_padding=”0|0px|54px|0px|false|false”][et_pb_row _builder_version=”3.25″][et_pb_column type=”4_4″ _builder_version=”3.25″ custom_padding=”|||” custom_padding__hover=”|||”][et_pb_tabs _builder_version=”4.8.1″ tab_font=”||||||||” tab_font_size=”16px” hover_enabled=”0″ sticky_enabled=”0″][et_pb_tab title=”Specifications” _builder_version=”4.8.1″ tab_font=”||||||||” tab_text_color=”#fe871f” hover_enabled=”0″ sticky_enabled=”0″]<\/p>\n [\/et_pb_tab][et_pb_tab title=”Features & Benefits” _builder_version=”3.19.10″ tab_font=”||||||||” tab_text_color=”#fe871f”]<\/p>\n The KDC product line incorporates KRI\u2019s patented self-aligned ion optics technology. The OptiBeam\u2122 grids do not require an alignment procedure. Through advanced engineering and precision construction, the straightforward assembly procedure assures the grids are aligned. The benefits of the self-aligning grids includes beam repeatability, extended grid lifetime, maximized ion current, reduced maintenance time and improved uptime.<\/p>\n [\/et_pb_tab][et_pb_tab title=”Downloads” _builder_version=”3.19.17″ tab_font=”||||||||” tab_text_color=”#fe871f”]<\/p>\nFeatures & Benefits<\/h3>\n
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\n\t \n<\/th> RFICP40<\/th> RFICP100<\/th> RFICP140<\/th> RFICP220<\/th> RFICP380<\/th>\n<\/tr>\n<\/thead>\n \n\t Ion Beam Current<\/td> > 100 mA<\/td> > 350 mA<\/td> > 600 mA<\/td> > 800 mA<\/td> > 500 mA<\/td>\n<\/tr>\n \n\t Beam VOltage<\/td> 100 - 1200 V<\/td> 100 - 1200 V<\/td> 100 - 1200 V<\/td> 100 - 1200 V<\/td> 100 - 1200 V<\/td>\n<\/tr>\n \n\t Beam Size at Gitter<\/td> 40 mm<\/td> > 100 mm<\/td> 140 mm<\/td> > 200 mm<\/td> > 360 mm<\/td>\n<\/tr>\n \n\t Gasflow<\/td> 3 - 10 sccm<\/td> 5 - 30 sccm<\/td> 5 - 30 sccm<\/td> 10 - 40 sccm<\/td> 10 - 80 sccm<\/td>\n<\/tr>\n \n\t Length<\/td> 135 mm<\/td> 191 mm<\/td> 246 mm<\/td> 410 mm<\/td> 580 mm<\/td>\n<\/tr>\n \n\t Height<\/td> 127 mm<\/td> 235 mm<\/td> 246 mm<\/td> 300 mm<\/td> 380 mm<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n\n<\/div>\n Self-Aligning Grids (OptiBeam\u2122)<\/h3>\n