{"id":4426,"date":"2019-02-05T21:38:10","date_gmt":"2019-02-05T20:38:10","guid":{"rendered":"https:\/\/shop.beamtec.de\/wpl\/mf-versorgungen-40-khz\/"},"modified":"2021-01-19T15:38:35","modified_gmt":"2021-01-19T14:38:35","slug":"mf-power-supplies-40-khz","status":"publish","type":"page","link":"https:\/\/www.beamtec.de\/en\/mf-power-supplies-40-khz\/","title":{"rendered":"MF-Supplies 40 kHz"},"content":{"rendered":"<p>[et_pb_section fb_built=&#8221;1&#8243; _builder_version=&#8221;3.22.3&#8243; background_color=&#8221;#f7f7f7&#8243; max_width_tablet=&#8221;&#8221; max_width_phone=&#8221;100%&#8221; max_width_last_edited=&#8221;on|desktop&#8221; custom_margin=&#8221;|||0px&#8221; custom_padding=&#8221;0px||10px&#8221; saved_tabs=&#8221;all&#8221;][et_pb_row use_custom_gutter=&#8221;on&#8221; gutter_width=&#8221;1&#8243; custom_padding_last_edited=&#8221;on|desktop&#8221; padding_top_bottom_link_1=&#8221;true&#8221; module_class=&#8221; et_pb_row_fullwidth&#8221; _builder_version=&#8221;3.25&#8243; background_image=&#8221;https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/02\/header-MF.jpg&#8221; width=&#8221;100%&#8221; width_tablet=&#8221;100%&#8221; width_phone=&#8221;&#8221; width_last_edited=&#8221;on|desktop&#8221; max_width=&#8221;100%&#8221; max_width_tablet=&#8221;100%&#8221; max_width_phone=&#8221;&#8221; max_width_last_edited=&#8221;on|desktop&#8221; module_alignment=&#8221;center&#8221; custom_margin=&#8221;|||&#8221; custom_padding=&#8221;60px||60px|0px|true&#8221; custom_padding_tablet=&#8221;&#8221; custom_padding_phone=&#8221;&#8221; make_fullwidth=&#8221;on&#8221; custom_width_px=&#8221;2600px&#8221;][et_pb_column type=&#8221;4_4&#8243; _builder_version=&#8221;3.25&#8243; custom_padding=&#8221;0px||0px|0px&#8221; custom_padding__hover=&#8221;|||&#8221;][et_pb_blurb title=&#8221;Plasma Power Supplies&#8221; content_max_width=&#8221;718px&#8221; _builder_version=&#8221;3.19.10&#8243; header_level=&#8221;h1&#8243; header_font=&#8221;||||||||&#8221; header_text_align=&#8221;center&#8221; header_text_color=&#8221;#fe871f&#8221; header_font_size=&#8221;59px&#8221; body_font=&#8221;||||||||&#8221; body_text_align=&#8221;center&#8221; body_text_color=&#8221;#ffffff&#8221; body_font_size=&#8221;30px&#8221; custom_margin=&#8221;34px||&#8221; custom_padding=&#8221;25px||25px||true&#8221; custom_padding_tablet=&#8221;0px||0px|&#8221; custom_padding_phone=&#8221;0px||0px|&#8221; custom_padding_last_edited=&#8221;on|desktop&#8221; header_font_size_tablet=&#8221;37px&#8221; header_font_size_phone=&#8221;25px&#8221; header_font_size_last_edited=&#8221;on|tablet&#8221; body_font_size_tablet=&#8221;25px&#8221; body_font_size_phone=&#8221;20px&#8221; body_font_size_last_edited=&#8221;on|phone&#8221;]<\/p>\n<p>40 kHz MF-Generators<\/p>\n<p>[\/et_pb_blurb][\/et_pb_column][\/et_pb_row][\/et_pb_section][et_pb_section fb_built=&#8221;1&#8243; admin_label=&#8221;Breadcrumb&#8221; _builder_version=&#8221;3.22.3&#8243; background_color=&#8221;#f7f7f7&#8243; custom_padding=&#8221;0|0px|0|0px|false|false&#8221;][et_pb_row _builder_version=&#8221;3.25&#8243; custom_padding=&#8221;0|0px|27px|0px|false|false&#8221;][et_pb_column type=&#8221;4_4&#8243; _builder_version=&#8221;3.25&#8243; custom_padding=&#8221;|||&#8221; custom_padding__hover=&#8221;|||&#8221;][et_pb_text _builder_version=&#8221;3.27.4&#8243;]<\/p>\n<p><a href=\"https:\/\/www.beamtec.de\/en\/\">Home<\/a> \u00bb <a href=\"https:\/\/www.beamtec.de\/en\/plasma-power-supplies\/\">Plasma Power Supplies<\/a> \u00bb 40 kHz MF-Generators<\/p>\n<p>[\/et_pb_text][\/et_pb_column][\/et_pb_row][\/et_pb_section][et_pb_section fb_built=&#8221;1&#8243; _builder_version=&#8221;3.22.3&#8243; background_color=&#8221;#f7f7f7&#8243; custom_padding=&#8221;0|0px|0|0px|false|false&#8221;][et_pb_row _builder_version=&#8221;3.25&#8243; custom_padding=&#8221;27px|0px|0|0px|false|false&#8221; column_structure=&#8221;2_3,1_3&#8243;][et_pb_column type=&#8221;2_3&#8243; _builder_version=&#8221;3.25&#8243; custom_padding=&#8221;|||&#8221; custom_padding__hover=&#8221;|||&#8221;][et_pb_text _builder_version=&#8221;3.27.4&#8243;]<\/p>\n<h2>BDS-MF 5\/10\/15 kW @ 40kHz, High \/Low Voltage AC plasma generator<\/h2>\n<p>The BDS-MF 40 kHz plasma generator was developed for plasma excitation in Sputter, PECVD and Plasma cleaning processes. The product range includes 5 kW, 10 kW and 15 kW devices that are capable to deliver up to 13000 V RMS output when combined with a downstream transformer.<\/p>\n<p>The air cooled basic device provides the output voltage of 400 V, 650 V and 800 V on 3 taps for sputter processes. For PECVD processes an external HV transformer transforms the voltage to up to 7000 V RMS. The output is balanced type, capable to drive 4 symmetrical electrodes.<\/p>\n<p>Additionally a special transformer allows for the use of atmospheric plasma.<\/p>\n<p>Typical applications:<\/p>\n<ul>\n<li>PECVD processes in bigger vacuum systems<\/li>\n<li>Surface activation<\/li>\n<li>Sputter and Glim processes for polymers and reflectors<\/li>\n<li>Atmospheric plasma processes<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<p>[\/et_pb_text][\/et_pb_column][et_pb_column type=&#8221;1_3&#8243; _builder_version=&#8221;3.25&#8243; custom_padding=&#8221;|||&#8221; custom_padding__hover=&#8221;|||&#8221;][et_pb_text _builder_version=&#8221;3.19.17&#8243; global_module=&#8221;3036&#8243;]<\/p>\n<h4><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-3034 alignnone size-full lazyload\" data-src=\"https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/02\/bdiscom-300.png\" alt=\"bdiscom logo\" width=\"300\" height=\"53\" src=\"data:image\/gif;base64,R0lGODlhAQABAAAAACH5BAEKAAEALAAAAAABAAEAAAICTAEAOw==\" style=\"--smush-placeholder-width: 300px; --smush-placeholder-aspect-ratio: 300\/53;\"><noscript><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-3034 alignnone size-full\" src=\"https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/02\/bdiscom-300.png\" alt=\"bdiscom logo\" width=\"300\" height=\"53\"><\/noscript><\/h4>\n<h4>About BDISCOM Srl<\/h4>\n<p>BDISCOM Srl is an italien manufacurer of plasma processing tools that are specially designed for applications in research and industry. The product range includes plasma power supplies for several frequency ranges as well as smaller plasma systems for surface modifications. The product range includes plasma power supplies for several frequency ranges as well as smaller plasma systems for surface modifications.<\/p>\n<p>&nbsp;<\/p>\n<p>[\/et_pb_text][et_pb_text _builder_version=&#8221;3.27.4&#8243;]<\/p>\n<h4>Features &amp; Benefits<\/h4>\n<ul>\n<li>Wide operating range with 3 taps<\/li>\n<li>Ultra fast Arc-Handling<\/li>\n<li>Air cooled<\/li>\n<li>Analog + RS232 interface \/ Profibus<\/li>\n<li>User friendly with frontpanel display<\/li>\n<li>High efficiency &gt;90%<\/li>\n<li>Comptact and light weight, 22 kg, 19&#8243; 4 U<\/li>\n<\/ul>\n<p>[\/et_pb_text][\/et_pb_column][\/et_pb_row][et_pb_row _builder_version=&#8221;3.25&#8243; custom_padding=&#8221;27px|0px|56px|0px|false|false&#8221;][et_pb_column type=&#8221;4_4&#8243; _builder_version=&#8221;3.25&#8243; custom_padding=&#8221;|||&#8221; custom_padding__hover=&#8221;|||&#8221;][et_pb_text _builder_version=&#8221;4.8.1&#8243; hover_enabled=&#8221;0&#8243; sticky_enabled=&#8221;0&#8243;]<\/p>\n<h2>Models &amp; Specifications<\/h2>\n<div id=\"tablepress-47-scroll-wrapper\" class=\"tablepress-scroll-wrapper\">\n\n<table id=\"tablepress-47\" class=\"tablepress tablepress-id-47 tablepress-responsive\">\n<thead>\n<tr class=\"row-1 odd\">\n\t<th class=\"column-1\"><\/th><th class=\"column-2\"><a href=\"https:\/\/www.beamtec.de\/en\/dc-and-pulsed-dc-power-supplies\/\">DC\/Pulsed DC Supplies<\/a><\/th><th class=\"column-3\"><a href=\"https:\/\/www.beamtec.de\/en\/mf-power-supplies-40-khz\/\">MF Generators 40 kHz<\/a><\/th><th class=\"column-4\"><a href=\"https:\/\/www.beamtec.de\/en\/rf-power-supplies-1356-mhz\/\">RF Power Supplies<\/a><\/th><th class=\"column-5\"><a href=\"https:\/\/www.beamtec.de\/en\/arc-glow-power-supplies\/\">Arc Power Supplies<\/a><\/th><th class=\"column-6\"><a href=\"https:\/\/www.beamtec.de\/en\/arc-glow-power-supplies\/\">Glow Power Supplies<\/a><\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr class=\"row-2 even\">\n\t<td class=\"column-1\"><\/td><td class=\"column-2\"><a href=\"https:\/\/www.beamtec.de\/en\/dc-and-pulsed-dc-power-supplies\/\"><img decoding=\"async\" data-src=\"https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/02\/MPS1500P-1.png\" alt=\"MPS1500P\" width=\"120\" class=\"alignnone size-full wp-image-2336 lazyload\" src=\"data:image\/gif;base64,R0lGODlhAQABAAAAACH5BAEKAAEALAAAAAABAAEAAAICTAEAOw==\" style=\"--smush-placeholder-width: 200px; --smush-placeholder-aspect-ratio: 200\/55;\" \/><noscript><img decoding=\"async\" src=\"https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/02\/MPS1500P-1.png\" alt=\"MPS1500P\" width=\"120\" class=\"alignnone size-full wp-image-2336\" \/><\/noscript><\/a><\/td><td class=\"column-3\"><a href=\"https:\/\/www.beamtec.de\/en\/mf-power-supplies-40-khz\/\"><img decoding=\"async\" data-src=\"https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/02\/MF-300.jpg\" alt=\"MF generator\" width=\"120\" class=\"alignnone size-full wp-image-2323 lazyload\" src=\"data:image\/gif;base64,R0lGODlhAQABAAAAACH5BAEKAAEALAAAAAABAAEAAAICTAEAOw==\" style=\"--smush-placeholder-width: 300px; --smush-placeholder-aspect-ratio: 300\/132;\" \/><noscript><img decoding=\"async\" data-src=\"https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/02\/MF-300.jpg\" alt=\"MF generator\" width=\"120\" class=\"alignnone size-full wp-image-2323 lazyload\" src=\"data:image\/gif;base64,R0lGODlhAQABAAAAACH5BAEKAAEALAAAAAABAAEAAAICTAEAOw==\" style=\"--smush-placeholder-width: 300px; --smush-placeholder-aspect-ratio: 300\/132;\" \/><noscript><img decoding=\"async\" src=\"https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/02\/MF-300.jpg\" alt=\"MF generator\" width=\"120\" class=\"alignnone size-full wp-image-2323\" \/><\/noscript><\/noscript><\/a><\/td><td class=\"column-4\"><a href=\"https:\/\/www.beamtec.de\/en\/rf-power-supplies-1356-mhz\/\"><img decoding=\"async\" data-src=\"https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/02\/BDS_HF_AFP-200.png\" alt=\"BDS HF AFP RF generator \" width=\"120\" class=\"alignnone size-full wp-image-2323 lazyload\" src=\"data:image\/gif;base64,R0lGODlhAQABAAAAACH5BAEKAAEALAAAAAABAAEAAAICTAEAOw==\" style=\"--smush-placeholder-width: 200px; --smush-placeholder-aspect-ratio: 200\/103;\" \/><noscript><img decoding=\"async\" src=\"https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/02\/BDS_HF_AFP-200.png\" alt=\"BDS HF AFP RF generator \" width=\"120\" class=\"alignnone size-full wp-image-2323\" \/><\/noscript><\/a><\/td><td class=\"column-5\"><a href=\"https:\/\/www.beamtec.de\/en\/arc-glow-power-supplies\/\"><img decoding=\"async\" data-src=\"https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/02\/MF-300.jpg\" alt=\"MF generator\" width=\"120\" class=\"alignnone size-full wp-image-2323 lazyload\" src=\"data:image\/gif;base64,R0lGODlhAQABAAAAACH5BAEKAAEALAAAAAABAAEAAAICTAEAOw==\" style=\"--smush-placeholder-width: 300px; --smush-placeholder-aspect-ratio: 300\/132;\" \/><noscript><img decoding=\"async\" data-src=\"https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/02\/MF-300.jpg\" alt=\"MF generator\" width=\"120\" class=\"alignnone size-full wp-image-2323 lazyload\" src=\"data:image\/gif;base64,R0lGODlhAQABAAAAACH5BAEKAAEALAAAAAABAAEAAAICTAEAOw==\" style=\"--smush-placeholder-width: 300px; --smush-placeholder-aspect-ratio: 300\/132;\" \/><noscript><img decoding=\"async\" src=\"https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/02\/MF-300.jpg\" alt=\"MF generator\" width=\"120\" class=\"alignnone size-full wp-image-2323\" \/><\/noscript><\/noscript><\/a><\/td><td class=\"column-6\"><a href=\"https:\/\/www.beamtec.de\/en\/arc-glow-power-supplies\/\"><img decoding=\"async\" data-src=\"https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/02\/222_bds_glow_2015.jpg\" alt=\"Glimmstrom-Versorgung\" width=\"120\" class=\"alignnone size-full wp-image-2323 lazyload\" src=\"data:image\/gif;base64,R0lGODlhAQABAAAAACH5BAEKAAEALAAAAAABAAEAAAICTAEAOw==\" style=\"--smush-placeholder-width: 376px; --smush-placeholder-aspect-ratio: 376\/140;\" \/><noscript><img decoding=\"async\" src=\"https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/02\/222_bds_glow_2015.jpg\" alt=\"Glimmstrom-Versorgung\" width=\"120\" class=\"alignnone size-full wp-image-2323\" \/><\/noscript><\/a><\/td>\n<\/tr>\n<tr class=\"row-3 odd\">\n\t<td class=\"column-1\">Max. Output Power<\/td><td class=\"column-2\">1500 W<\/td><td class=\"column-3\">15 kW<\/td><td class=\"column-4\">750 W<\/td><td class=\"column-5\">6,25 kW<\/td><td class=\"column-6\">6,25 kW<\/td>\n<\/tr>\n<tr class=\"row-4 even\">\n\t<td class=\"column-1\">Max. Output Current<\/td><td class=\"column-2\">2 A<\/td><td class=\"column-3\">35 A<\/td><td class=\"column-4\">n. a.<\/td><td class=\"column-5\">250 A<\/td><td class=\"column-6\">1,6 A<\/td>\n<\/tr>\n<tr class=\"row-5 odd\">\n\t<td class=\"column-1\">Max. Output Voltage<\/td><td class=\"column-2\">1200 V<\/td><td class=\"column-3\">800 V<\/td><td class=\"column-4\">n. a.<\/td><td class=\"column-5\">25 V<\/td><td class=\"column-6\">4000 V<\/td>\n<\/tr>\n<tr class=\"row-6 even\">\n\t<td class=\"column-1\">Mode of operation<\/td><td class=\"column-2\">DC and PulseDC<\/td><td class=\"column-3\">MF 40 kHz<br \/>\nwith pulse option<\/td><td class=\"column-4\">HF 13,56 MHz<\/td><td class=\"column-5\">DC<\/td><td class=\"column-6\">DC<\/td>\n<\/tr>\n<tr class=\"row-7 odd\">\n\t<td class=\"column-1\">Interfaces<\/td><td class=\"column-2\">RS232 or RS485,<br \/>\nBluetooth, EthernetIP, Analog I\/O<\/td><td class=\"column-3\">digital\/analog (PE II compatible interface); <br \/>\nRS232;<br \/>\nProfibus optional<\/td><td class=\"column-4\">digital\/analog IO, RS232,<br \/>\nProfibus optional<\/td><td class=\"column-5\">digital\/analog;<br \/>\nRS232;<br \/>\nProfibus optional<\/td><td class=\"column-6\">digital\/analog;<br \/>\nRS232;<br \/>\nProfibus optional<\/td>\n<\/tr>\n<tr class=\"row-8 even\">\n\t<td class=\"column-1\">Dimensions<\/td><td class=\"column-2\">19\", 2 HE<\/td><td class=\"column-3\">19\", 4 HE<\/td><td class=\"column-4\">1\/2 19\", 3 HE<br \/>\n<\/td><td class=\"column-5\">19\" , 4 HE<\/td><td class=\"column-6\">19\", 4 HE<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n\n<\/div><!-- #tablepress-47 from cache -->\n<p>[\/et_pb_text][\/et_pb_column][\/et_pb_row][\/et_pb_section]<\/p>\n","protected":false},"excerpt":{"rendered":"<p>40 kHz MF-GeneratorsHome \u00bb Plasma Power Supplies \u00bb 40 kHz MF-GeneratorsBDS-MF 5\/10\/15 kW @ 40kHz, High \/Low Voltage AC plasma generator The BDS-MF 40 kHz plasma generator was developed for plasma excitation in Sputter, PECVD and Plasma cleaning processes. The product range includes 5 kW, 10 kW and 15 kW devices that are capable to [&hellip;]<\/p>\n","protected":false},"author":2,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_et_pb_use_builder":"on","_et_pb_old_content":"","_et_gb_content_width":"","footnotes":""},"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v22.5 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>MF-Supplies 40 kHz for Plasma Excitation - BeamTec GmbH<\/title>\n<meta name=\"description\" content=\"BDS-MF 40 kHz Plasma generatorf for the plasma excitation in Sputter, PECVD and Plasma cleaning processes. 5 kW, 10 kW and 15 kW devices\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.beamtec.de\/en\/mf-power-supplies-40-khz\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"MF-Supplies 40 kHz for Plasma Excitation - 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