{"id":4395,"date":"2019-02-07T12:18:12","date_gmt":"2019-02-07T11:18:12","guid":{"rendered":"https:\/\/shop.beamtec.de\/wpl\/hf-generatoren-1356-mhz\/"},"modified":"2026-01-27T11:58:02","modified_gmt":"2026-01-27T10:58:02","slug":"rf-power-supplies-1356-mhz","status":"publish","type":"page","link":"https:\/\/www.beamtec.de\/en\/rf-power-supplies-1356-mhz\/","title":{"rendered":"RF power supplies 13,56 MHz"},"content":{"rendered":"

[et_pb_section fb_built=”1″ _builder_version=”4.16″ background_color=”#f7f7f7″ max_width_tablet=”” max_width_phone=”100%” max_width_last_edited=”on|desktop” custom_margin=”|||0px” custom_padding=”0px||10px” saved_tabs=”all” global_colors_info=”{}”][et_pb_row use_custom_gutter=”on” gutter_width=”1″ custom_padding_last_edited=”on|desktop” padding_top_bottom_link_1=”true” module_class=” et_pb_row_fullwidth” _builder_version=”4.16″ background_image=”https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/02\/header-RF-generator2.jpg” width=”100%” width_tablet=”100%” width_phone=”” width_last_edited=”on|desktop” max_width=”100%” max_width_tablet=”100%” max_width_phone=”” max_width_last_edited=”on|desktop” module_alignment=”center” custom_margin=”|||” custom_padding=”60px||60px|0px|true” custom_padding_tablet=”” custom_padding_phone=”” make_fullwidth=”on” custom_width_px=”2600px” global_colors_info=”{}”][et_pb_column type=”4_4″ _builder_version=”4.16″ custom_padding=”0px||0px|0px” global_colors_info=”{}” custom_padding__hover=”|||”][et_pb_blurb title=”Plasma Power Supplies” content_max_width=”718px” _builder_version=”4.16″ header_level=”h1″ header_font=”||||||||” header_text_align=”center” header_text_color=”#fe871f” header_font_size=”59px” body_font=”||||||||” body_text_align=”center” body_text_color=”#ffffff” body_font_size=”30px” custom_margin=”34px||” custom_padding=”25px||25px||true” custom_padding_tablet=”0px||0px|” custom_padding_phone=”0px||0px|” custom_padding_last_edited=”on|desktop” header_font_size_tablet=”37px” header_font_size_phone=”25px” header_font_size_last_edited=”on|tablet” body_font_size_tablet=”25px” body_font_size_phone=”20px” body_font_size_last_edited=”on|phone” global_colors_info=”{}”]13,56 MHz Generators
\n[\/et_pb_blurb][\/et_pb_column][\/et_pb_row][\/et_pb_section][et_pb_section fb_built=”1″ admin_label=”Breadcrumb” _builder_version=”4.16″ background_color=”#f7f7f7″ custom_padding=”0|0px|0|0px|false|false” global_colors_info=”{}”][et_pb_row _builder_version=”4.16″ custom_padding=”0|0px|27px|0px|false|false” global_colors_info=”{}”][et_pb_column type=”4_4″ _builder_version=”4.16″ custom_padding=”|||” global_colors_info=”{}” custom_padding__hover=”|||”][et_pb_text _builder_version=”4.16″ global_colors_info=”{}”]Home<\/a> \u00bb Plasma Power Supplies<\/a> \u00bb 13,56 MHz Generators
\n[\/et_pb_text][\/et_pb_column][\/et_pb_row][\/et_pb_section][et_pb_section fb_built=”1″ _builder_version=”4.16″ background_color=”#f7f7f7″ custom_padding=”0|0px|0|0px|false|false” global_colors_info=”{}”][et_pb_row column_structure=”2_3,1_3″ _builder_version=”4.16″ custom_padding=”27px|0px|0|0px|false|false” global_colors_info=”{}”][et_pb_column type=”2_3″ _builder_version=”4.16″ custom_padding=”|||” global_colors_info=”{}” custom_padding__hover=”|||”][et_pb_text _builder_version=”4.16″ global_colors_info=”{}”]<\/p>\n

RF Generators<\/h2>\n

BDS-HF 200\/300\/750 AFP-Series<\/h3>\n

BeamTec introduces RF generators with an active front panel user interface that deliver a power output of up to 750 W. The BDS HF series is a class E circuit with 85-90% typical efficiency. In addition to an analogue \/ digital interface, an optional control via Profibus is also available.
\n[\/et_pb_text][et_pb_text _builder_version=”4.16″ global_colors_info=”{}”]<\/p>\n

BDS-AMN 750 Auto Matching Unit<\/h3>\n

The automatic Matchbox BDS-AMN750 matches the plasma impedance automatically to the 50 Ohm impedance of the 13,56 MHz generator. Two motorized power capacitors are used for fast power adjustment in an L configuration or for medium impedance via a TEE configuration. An integrated DC-BIAS measurement allows for the control of an constant bias from the BDS-AFP generator series.
\n[\/et_pb_text][\/et_pb_column][et_pb_column type=”1_3″ _builder_version=”4.16″ custom_padding=”|||” global_colors_info=”{}” custom_padding__hover=”|||”][et_pb_text _builder_version=”3.19.17″ global_module=”3036″ saved_tabs=”all” global_colors_info=”{}”]<\/p>\n

\"bdiscom<\/h4>\n

About BDISCOM Srl<\/h4>\n

BDISCOM Srl is an italien manufacurer of plasma processing tools that are specially designed for applications in research and industry. The product range includes plasma power supplies for several frequency ranges as well as smaller plasma systems for surface modifications. The product range includes plasma power supplies for several frequency ranges as well as smaller plasma systems for surface modifications.<\/p>\n

 <\/p>\n

[\/et_pb_text][et_pb_image src=”https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/02\/bds_amn600-200.gif” align_tablet=”center” align_phone=”” align_last_edited=”on|desktop” _builder_version=”4.16″ global_colors_info=”{}”][\/et_pb_image][\/et_pb_column][\/et_pb_row][et_pb_row column_structure=”2_3,1_3″ _builder_version=”4.16″ custom_padding=”27px|0px|0|0px|false|false” global_colors_info=”{}”][et_pb_column type=”2_3″ _builder_version=”4.16″ custom_padding=”|||” global_colors_info=”{}” custom_padding__hover=”|||”][et_pb_text _builder_version=”4.27.5″ _module_preset=”default” global_colors_info=”{}”]<\/p>\n

EDF PPSxxxRC RF generators with integrated matchbox<\/h3>\n

BeamTec presents the innovative PPS RF series: A compact 2-in-1 system that combines a 13.56 MHz RF generator and automatic matchbox in a single 19\u2033 housing. Despite integrating the matchbox into the 19\u2033 housing, a sputter source with a 4m cable length can be matched within 2 seconds.<\/p>\n

Key Features<\/strong><\/h5>\n
    \n
  • Matchbox and generator in single 19\u2033, 3 U unit<\/li>\n
  • 300 W or 600 W generator, 13.56 MHz; air-cooled<\/li>\n
  • Pulsing feature up to 30 kHz with fully adjustable duty cycle for flexible applications<\/li>\n
  • Fully digital, precise tuning in <2 s, AGC for stable output power<\/li>\n
  • Precise measurement of\u00a0 forward power, reflected power and load impedance<\/li>\n
  • Control: Local, IO, RS485 (Modbus), RJ45 (web browser)<\/li>\n
  • Optional: Separate RF supply (2U) and matchbox<\/li>\n
  • Assembly and CE testing in Europe<\/li>\n<\/ul>\n

    [\/et_pb_text][\/et_pb_column][et_pb_column type=”1_3″ _builder_version=”4.16″ custom_padding=”|||” global_colors_info=”{}” custom_padding__hover=”|||”][et_pb_text _builder_version=”4.27.5″ hover_enabled=”0″ saved_tabs=”all” global_colors_info=”{}” sticky_enabled=”0″]<\/p>\n

    \"\"<\/h4>\n

    About EDF electronics sp. z o.o.<\/h4>\n

    EDF electronics is our Polish partner, developer, and manufacturer of innovative plasma power supplies in the lower power range, as well as quartz monitors for thin-film technology.<\/p>\n

    [\/et_pb_text][et_pb_image src=”https:\/\/www.beamtec.de\/wp-content\/uploads\/2026\/01\/EDF-PPSxxxRC-400.png” title_text=”EDF-PPSxxxRC-400″ _builder_version=”4.27.5″ _module_preset=”default” global_colors_info=”{}”][\/et_pb_image][\/et_pb_column][\/et_pb_row][et_pb_row _builder_version=”4.16″ custom_padding=”27px|0px|0|0px|false|false” global_colors_info=”{}”][et_pb_column type=”4_4″ _builder_version=”4.16″ custom_padding=”|||” global_colors_info=”{}” custom_padding__hover=”|||”][et_pb_text _builder_version=”4.27.5″ global_colors_info=”{}”]<\/p>\n

    Specifications<\/h2>\n\n\n\n\n\t\n\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t
    <\/td>\"BDS<\/th>\"EDF<\/th>\"EDF<\/th>\n<\/tr>\n<\/thead>\n
    <\/td>

    BDS-HF-xxx AFP<\/h3><\/td>

    BT-PPS300RC<\/h3><\/td>

    BT-PPS600RC<\/h3><\/td>\n<\/tr>\n

    Output power<\/td>200 W, 300 W, 750 W<\/td>300 W<\/td>600 W<\/td>\n<\/tr>\n
    Matchbox<\/td>BDS-AMN750<\/td>integrated<\/td>integrated<\/td>\n<\/tr>\n
    Frequency<\/td>13,56 MHz<\/td>13,56 MHz<\/td>13,56 MHz<\/td>\n<\/tr>\n
    Pulsing option<\/td>-<\/td>100 Hz - 30 kHz<\/td>100 Hz - 30 kHz<\/td>\n<\/tr>\n
    User interface<\/td>Touch Screen Display with Encoder<\/td>Touch Screen Display with Encoder<\/td>Touch Screen Display with Encoder<\/td>\n<\/tr>\n
    Outputs<\/td>N-Socket<\/td>DIN 7\/16<\/td>DIN 7\/16<\/td>\n<\/tr>\n
    Interfaces<\/td>digital\/analog IO, RS232,
    \nProfibus optional<\/td>    		digital\/analog IO, RS485, Ethernet<\/td>digital\/analog IO, RS485, Ethernet<\/td>\n<\/tr>\n
    Main supply<\/td>1x 230 VAC<\/td>1x 230 VAC<\/td>1x 230 VAC<\/td>\n<\/tr>\n
    Dimensions<\/td>1\/2 19\" x 3 U, 410 mm depth<\/td>19\" x 3 U, 435 mm depth<\/td>19\" x 3 U, 500 mm depth<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n\n

    [\/et_pb_text][\/et_pb_column][\/et_pb_row][\/et_pb_section]<\/p>\n","protected":false},"excerpt":{"rendered":"

    13,56 MHz Generators Home \u00bb Plasma Power Supplies \u00bb 13,56 MHz Generators RF Generators BDS-HF 200\/300\/750 AFP-Series BeamTec introduces RF generators with an active front panel user interface that deliver a power output of up to 750 W. The BDS HF series is a class E circuit with 85-90% typical efficiency. In addition to an […]<\/p>\n","protected":false},"author":2,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_et_pb_use_builder":"on","_et_pb_old_content":"","_et_gb_content_width":"","_vp_format_video_url":"","_vp_image_focal_point":[],"footnotes":""},"class_list":["post-4395","page","type-page","status-publish","hentry"],"yoast_head":"\nRF power supplies 13,56 MHz - BeamTec GmbH<\/title>\n<meta name=\"description\" content=\"RF Generators and Plasma power supplies from 100 to 750 W. Matchboxes to match the impedance and to ansure a constant bias.\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.beamtec.de\/en\/rf-power-supplies-1356-mhz\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"RF power supplies 13,56 MHz - BeamTec GmbH\" \/>\n<meta property=\"og:description\" content=\"RF Generators and Plasma power supplies from 100 to 750 W. 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