{"id":4383,"date":"2019-02-04T13:55:10","date_gmt":"2019-02-04T12:55:10","guid":{"rendered":"https:\/\/shop.beamtec.de\/wpl\/elektronenemitter\/"},"modified":"2019-03-05T16:31:50","modified_gmt":"2019-03-05T15:31:50","slug":"electron-emitter","status":"publish","type":"page","link":"https:\/\/www.beamtec.de\/en\/electron-emitter\/","title":{"rendered":"Electron Emitter"},"content":{"rendered":"<p>[et_pb_section fb_built=&#8221;1&#8243; _builder_version=&#8221;3.18.4&#8243; background_color=&#8221;#f7f7f7&#8243; max_width_phone=&#8221;100%&#8221; max_width_last_edited=&#8221;on|desktop&#8221; custom_margin=&#8221;|||0px&#8221; custom_padding=&#8221;0px||10px&#8221; saved_tabs=&#8221;all&#8221;][et_pb_row make_fullwidth=&#8221;on&#8221; custom_width_px=&#8221;2600px&#8221; use_custom_gutter=&#8221;on&#8221; gutter_width=&#8221;1&#8243; custom_padding=&#8221;60px||60px|0px|true&#8221; custom_margin=&#8221;|||&#8221; custom_padding_last_edited=&#8221;on|desktop&#8221; padding_top_bottom_link_1=&#8221;true&#8221; padding_top_1=&#8221;0px&#8221; padding_bottom_1=&#8221;0px&#8221; padding_left_1=&#8221;0px&#8221; _builder_version=&#8221;3.19.9&#8243; background_image=&#8221;https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/01\/rficp-blur.jpg&#8221; module_alignment=&#8221;center&#8221;][et_pb_column type=&#8221;4_4&#8243; _builder_version=&#8221;3.18.4&#8243;][et_pb_blurb title=&#8221;Ion Sources&#8221; content_max_width=&#8221;718px&#8221; _builder_version=&#8221;3.19.12&#8243; header_level=&#8221;h1&#8243; header_font=&#8221;||||||||&#8221; header_text_align=&#8221;center&#8221; header_text_color=&#8221;#fe871f&#8221; header_font_size=&#8221;59px&#8221; header_font_size_tablet=&#8221;37px&#8221; header_font_size_phone=&#8221;25px&#8221; header_font_size_last_edited=&#8221;on|tablet&#8221; body_font=&#8221;||||||||&#8221; body_text_align=&#8221;center&#8221; body_text_color=&#8221;#ffffff&#8221; body_font_size=&#8221;30px&#8221; body_font_size_tablet=&#8221;25px&#8221; body_font_size_phone=&#8221;20px&#8221; body_font_size_last_edited=&#8221;on|phone&#8221; custom_margin=&#8221;34px||&#8221; custom_padding=&#8221;25px||25px||true&#8221; custom_padding_tablet=&#8221;0px||0px|&#8221; custom_padding_phone=&#8221;0px||0px|&#8221; custom_padding_last_edited=&#8221;on|desktop&#8221;]Elecron Emitter[\/et_pb_blurb][\/et_pb_column][\/et_pb_row][et_pb_row custom_padding=&#8221;0|0px|27px|0px|false|false&#8221; _builder_version=&#8221;3.19.9&#8243;][et_pb_column type=&#8221;4_4&#8243; _builder_version=&#8221;3.19.9&#8243;][et_pb_text _builder_version=&#8221;3.19.9&#8243;]<a href=\"https:\/\/www.beamtec.de\/en\/\">Home<\/a> \u00bb\u00a0<a href=\"https:\/\/www.beamtec.de\/en\/ion-sources\/\">Ionenquellen\u00a0<\/a>\u00bb Electron Emitter[\/et_pb_text][\/et_pb_column][\/et_pb_row][\/et_pb_section][et_pb_section fb_built=&#8221;1&#8243; _builder_version=&#8221;3.19.9&#8243; background_color=&#8221;#f7f7f7&#8243; custom_padding=&#8221;0|0px|0|0px|false|false&#8221;][et_pb_row custom_padding=&#8221;27px|0px|0|0px|false|false&#8221; _builder_version=&#8221;3.19.9&#8243;][et_pb_column type=&#8221;2_3&#8243; _builder_version=&#8221;3.19.9&#8243;][et_pb_text _builder_version=&#8221;3.19.10&#8243;]BeamTec offers several types of KRIs low energy and high current electron sources. The source technologies vary from simple immersed thermionic filaments to non-immersed hollow cathode emitters. Typically, these electron sources can function as both a cathode and\/or neutralizer in conjunction with a plasma or ion source. Their operation in inert and reactive gas environments is standard.\u00a0 The emission current from our electron source products is measured and controlled with a current feedback loop.\u00a0Because of this precise and reliable source of electrons, the KRI electron sources are successfully used in electrostatic sensitive applications and dielectric material environments.[\/et_pb_text][et_pb_image src=&#8221;https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/02\/electronsource.png&#8221; align=&#8221;center&#8221; _builder_version=&#8221;3.19.10&#8243;][\/et_pb_image][\/et_pb_column][et_pb_column type=&#8221;1_3&#8243; _builder_version=&#8221;3.19.9&#8243;][et_pb_text _builder_version=&#8221;3.19.10&#8243;]<\/p>\n<h4>Neutralization of ion beams<\/h4>\n<ul>\n<li>DC Gridded Ion Sources<\/li>\n<li>End-Hall Ion Sources<\/li>\n<li>Anode Layer Ion Sources<\/li>\n<\/ul>\n<h4>Ionization in plasma generation<\/h4>\n<ul>\n<li>End-Hall Ion Sources<\/li>\n<li>DC Gridded Ion Sources<\/li>\n<\/ul>\n<h4>Charge neutrality in positive biased analytical instrumentation<\/h4>\n<h4>Enhanced electron flux in magnetron sputtering<\/h4>\n<p>[\/et_pb_text][\/et_pb_column][\/et_pb_row][et_pb_row custom_padding=&#8221;27px|0px|0|0px|false|false&#8221; _builder_version=&#8221;3.19.9&#8243;][et_pb_column type=&#8221;4_4&#8243; _builder_version=&#8221;3.19.9&#8243;][et_pb_text _builder_version=&#8221;3.19.10&#8243;]BeamTec offers a comprehensive electron source product package. The package is complete with components required to install and operate the electron source products<strong>,\u00a0<\/strong>including the electron source, power supply controller, mass flow controller, vacuum feedthroughs, and cables.[\/et_pb_text][\/et_pb_column][\/et_pb_row][et_pb_row make_equal=&#8221;on&#8221; background_size_1=&#8221;contain&#8221; background_size_2=&#8221;contain&#8221; background_size_3=&#8221;contain&#8221; background_size_4=&#8221;contain&#8221; background_position_1=&#8221;bottom_center&#8221; background_position_2=&#8221;bottom_center&#8221; background_position_3=&#8221;bottom_center&#8221; background_position_4=&#8221;bottom_center&#8221; background_repeat_1=&#8221;no-repeat&#8221; background_repeat_2=&#8221;no-repeat&#8221; background_repeat_3=&#8221;no-repeat&#8221; background_repeat_4=&#8221;no-repeat&#8221; _builder_version=&#8221;3.19.10&#8243;][et_pb_column type=&#8221;1_3&#8243; _builder_version=&#8221;3.19.10&#8243;][et_pb_text _builder_version=&#8221;3.19.10&#8243; custom_padding=&#8221;||55px&#8221; custom_padding_tablet=&#8221;||20px&#8221; custom_padding_last_edited=&#8221;on|phone&#8221;]<\/p>\n<h4>Filament<br \/>\nFilament Sidewinder<\/h4>\n<p>[\/et_pb_text][et_pb_image src=&#8221;https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/02\/Sidewinder.png&#8221; align=&#8221;center&#8221; _builder_version=&#8221;3.19.10&#8243;][\/et_pb_image][\/et_pb_column][et_pb_column type=&#8221;1_3&#8243; _builder_version=&#8221;3.19.10&#8243;][et_pb_text _builder_version=&#8221;3.19.10&#8243;]<\/p>\n<h4>SHC Small Hollow Cathode<br \/>\nMHC Medium Hollow Cathode<br \/>\nLHC Large Hollow Cathode<br \/>\nLDHC Disposable Hollow Cathode<\/h4>\n<p>[\/et_pb_text][et_pb_image src=&#8221;https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/02\/MHC1000.png&#8221; align=&#8221;center&#8221; _builder_version=&#8221;3.19.10&#8243;][\/et_pb_image][\/et_pb_column][et_pb_column type=&#8221;1_3&#8243; _builder_version=&#8221;3.19.10&#8243;][et_pb_text _builder_version=&#8221;3.19.10&#8243; custom_padding=&#8221;||35px&#8221; custom_padding_phone=&#8221;||&#8221; custom_padding_last_edited=&#8221;on|desktop&#8221;]<\/p>\n<h4>LFN Low Frequency Neutralizer<br \/>\n(Plasma Bridge)<\/h4>\n<p>[\/et_pb_text][et_pb_image src=&#8221;https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/02\/LFN.png&#8221; align=&#8221;center&#8221; _builder_version=&#8221;3.19.10&#8243;][\/et_pb_image][\/et_pb_column][\/et_pb_row][et_pb_row _builder_version=&#8221;3.19.10&#8243;][et_pb_column type=&#8221;4_4&#8243; _builder_version=&#8221;3.19.10&#8243;][et_pb_text _builder_version=&#8221;3.19.10&#8243;]Typically, the KRI electron source products are installed in a materials processing environment. Commonly, they are integrated as neutralizers onto ion beam sources or they may be integrated into the ionization process of a plasma discharge. In other, more specialized applications, they can be installed with magnetron cathodes to modify the sputtering operation.[\/et_pb_text][\/et_pb_column][\/et_pb_row][\/et_pb_section][et_pb_section fb_built=&#8221;1&#8243; _builder_version=&#8221;3.19.9&#8243; background_color=&#8221;#f7f7f7&#8243; custom_padding=&#8221;0|0px|54px|0px|false|false&#8221;][et_pb_row _builder_version=&#8221;3.19.9&#8243;][et_pb_column type=&#8221;4_4&#8243; _builder_version=&#8221;3.19.9&#8243;][et_pb_tabs _builder_version=&#8221;3.19.17&#8243; tab_font=&#8221;||||||||&#8221; tab_font_size=&#8221;16px&#8221; body_font=&#8221;||||||||&#8221;][et_pb_tab title=&#8221;Features &#038; Benefits&#8221; _builder_version=&#8221;3.19.17&#8243; tab_font=&#8221;||||||||&#8221; tab_text_color=&#8221;#fe871f&#8221; body_font=&#8221;||||||||&#8221;]<\/p>\n<div class=\"product-feature\">\n<h3>Regulated Emission<\/h3>\n<p>The applied power to the KRI electron sources is tightly regulated to ensure accurate electron production. Not only does the power supply generate the specified electron current, but through a feedback loop, it measures and regulates the electron emission. Because the electron emission is controlled, the KRI electron source products provide a reliable and known source of negative charge to the application. The amount of electrons is precisely controlled to match positive charges. A properly neutralized ion beam will be stable and support an electrically neutral process on the substrate surface. This feature is particularly important when the process involves dielectric, electrically isolated, or electrostatic sensitive substrates. When a process uses an ambiguous source of electron and does not rely on a regulated emission current, the process risks charge build-up and instabilities.<\/p>\n<div class=\"product-feature\">\n<h3>Retrofittable<\/h3>\n<p>Because the KRI electron sources are available in a comprehensive product package, they can be retrofitted to ion source equipment which is already active in the field. A common example is the case when a user wants to upgrade to a non-immersed neutralizer from an ion source which is currently configured with an immersed filament. The ability to use the existing equipment and just add the appropriate electron source products offer s a cost effective upgrade.<\/p>\n<h3>Sidewinder<\/h3>\n<p>The eH Sidewinder\u2122 utilizes a patented technology to extend the filament lifetime over typical durations. This innovative operation offers the low cost filament configuration, yet provides longer operation before a filament change. The Sidewinder products shift the filament cathode \/ neutralizer from its typical center position to an off center position. Because the filament is no longer immersed in the high current density portion of the ion beam, its erosion by ion bombardment is reduced. By reducing the normal wear mechanism, the filament lifetime is significantly extended, which minimizes the risk of process interruption.<\/p>\n<h3>Soft Start<\/h3>\n<p>The electron source products use a soft start feature to ramp power to the cathode\/neutralizer during start-up. This ramping characteristic smoothes the initial power surge which conserves the service time of replaceable heated elements.<\/p>\n<\/div>\n<\/div>\n<div class=\"product-feature\"><\/div>\n<p>[\/et_pb_tab][et_pb_tab title=&#8221;Downloads&#8221; _builder_version=&#8221;3.19.17&#8243; tab_font=&#8221;||||||||&#8221; tab_text_color=&#8221;#fe871f&#8221;]<\/p>\n<p><a href=\"https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/02\/Gridded-Ion-Source-Brochure.pdf\"><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-4129 alignnone size-full lazyload\" data-src=\"https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/02\/adobe-pdf-icon.png\" alt=\"adobe-pdf-icon\" width=\"25\" height=\"25\" src=\"data:image\/gif;base64,R0lGODlhAQABAAAAACH5BAEKAAEALAAAAAABAAEAAAICTAEAOw==\" style=\"--smush-placeholder-width: 25px; --smush-placeholder-aspect-ratio: 25\/25;\" \/><noscript><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-4129 alignnone size-full\" src=\"https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/02\/adobe-pdf-icon.png\" alt=\"adobe-pdf-icon\" width=\"25\" height=\"25\" \/><\/noscript><\/a><a title=\"DC - und RFICP- Gitterionenquellen\" href=\"https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/02\/Gridded-Ion-Source-Brochure.pdf\" target=\"_blank\" rel=\"noopener noreferrer\">\u00a0Brochure \u201eDC &#8211; and RFICP- Gridded Ion Sources&#8221; (431 kB)<br \/> <\/a><a title=\"DC - und RFICP- Gitterionenquellen\" href=\"https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/02\/Gridded-Ion-Source-Brochure.pdf\" target=\"_blank\" rel=\"noopener noreferrer\"><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-2240 alignnone size-full lazyload\" data-src=\"https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/02\/gridded-ion-sources-brochure-150.jpg\" alt=\"\" width=\"150\" height=\"206\" src=\"data:image\/gif;base64,R0lGODlhAQABAAAAACH5BAEKAAEALAAAAAABAAEAAAICTAEAOw==\" style=\"--smush-placeholder-width: 150px; --smush-placeholder-aspect-ratio: 150\/206;\" \/><noscript><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-2240 alignnone size-full\" src=\"https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/02\/gridded-ion-sources-brochure-150.jpg\" alt=\"\" width=\"150\" height=\"206\" \/><\/noscript><\/a><\/p>\n<p>[\/et_pb_tab][\/et_pb_tabs][\/et_pb_column][\/et_pb_row][\/et_pb_section]<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Elecron EmitterHome \u00bb\u00a0Ionenquellen\u00a0\u00bb Electron EmitterBeamTec offers several types of KRIs low energy and high current electron sources. The source technologies vary from simple immersed thermionic filaments to non-immersed hollow cathode emitters. Typically, these electron sources can function as both a cathode and\/or neutralizer in conjunction with a plasma or ion source. Their operation in inert [&hellip;]<\/p>\n","protected":false},"author":2,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_et_pb_use_builder":"on","_et_pb_old_content":"","_et_gb_content_width":"","footnotes":""},"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v22.5 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>Electron Emitter for beam ionization or neutralization - BeamTec GmbH<\/title>\n<meta name=\"description\" content=\"Several types of KRIs low energy and high current electron sources for ion beam neutralization.\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.beamtec.de\/en\/electron-emitter\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Electron Emitter for beam ionization or neutralization - 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