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The MPS models are versatile dual source power supplies for R&D coating & cleaning applications. They can control up to two sources sequentially which can be any combination of compact magnetron sputter sources or glow discharge electrodes.
The model MPS1500P offers DC or pulsed DC mode operation with intuitive pulse width control on the graphical LCD screen. DC only models are available in 500 and 1500 Watts power range.<\/p>\n
Stability and Control<\/h3>\n
Extremely stable output allows for operating the sources even at low power levels (< 2W). This makes this device unique in its class and ideal for low rate and precise coating applications.<\/p>\n
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Features & Benefits<\/h4>\n\n- DC and\/or pulsed DC operating mode<\/li>\n
- Integrated switch to connect up to two magnetrons<\/li>\n
- Fast arc detection and suppression<\/li>\n
- Selectable voltage, current & power regulation mode<\/li>\n
- Stable operation down to 2 Watts<\/li>\n
- Large impedance range<\/li>\n
- Ideal for 1\u201c to 4\u201c magnetron operation<\/li>\n
- User friendly interface with LCD display, keypad and rotary encoder operation<\/li>\n<\/ul>\n
[\/et_pb_text][\/et_pb_column][\/et_pb_row][\/et_pb_section][et_pb_section fb_built=”1″ _builder_version=”4.16″ background_color=”#f7f7f7″ global_colors_info=”{}”][et_pb_row _builder_version=”4.16″ global_colors_info=”{}”][et_pb_column type=”4_4″ _builder_version=”4.16″ custom_padding=”|||” global_colors_info=”{}” custom_padding__hover=”|||”][et_pb_tabs _builder_version=”4.27.5″ tab_text_color=”#fe871f” tab_font=”||||||||” tab_font_size=”16px” hover_enabled=”0″ global_colors_info=”{}” sticky_enabled=”0″][et_pb_tab title=”Models & Specifications” _builder_version=”4.27.5″ global_colors_info=”{}”]<\/p>\n\n
\n\n\n\t<\/td> ![\"MPS1500P\"](\"data:image\/svg+xml;base64,PHN2ZyB3aWR0aD0iMSIgaGVpZ2h0PSIxIiB4bWxucz0iaHR0cDovL3d3dy53My5vcmcvMjAwMC9zdmciPjwvc3ZnPg==\")
<\/th><\/th> <\/th> <\/th>\n<\/tr>\n<\/thead>\n \n\n\t<\/td> MPS500DC<\/h3><\/td>MPS1500DC<\/h3><\/td>MPS1500P<\/h3><\/td>KRI 3000<\/h3><\/td>\n<\/tr>\n\n\tMax output power<\/td> 500 W DC<\/td> 1500 W DC<\/td> 1500 W (DC)
\n1050 W (Pulsed DC - unipolar)
\n<\/td> 3000 W (DC \/unipolar gepulstes DC; reverse Charge)<\/td>\n<\/tr>\n \n\tOutput voltage<\/td> 1000 V (ignition 1200 V)<\/td> 1000 V (ignition 1200 V)<\/td> 1000 V (ignition 1200 V)<\/td> -1000 V; + 150 V<\/td>\n<\/tr>\n \n\tOutput current<\/td> 2 A max<\/td> 3 A max<\/td> 3 A max<\/td> 10 A max<\/td>\n<\/tr>\n \n\tMode of operation<\/td> DC<\/td> DC<\/td> DC und PulseDC (duty cycle 2 ..70 %)<\/td> DC and PulsedDC <\/td>\n<\/tr>\n \n\tOutputs<\/td> 2; connector N-Typ<\/td> 2; connector N-Typ<\/td> 2; connector N-Typ<\/td> 1<\/td>\n<\/tr>\n \n\tFrequency of operation<\/td> -<\/td> -<\/td> 10..300 kHz for PulseDC<\/td> 10 .. 100 kHz for PulsedDC<\/td>\n<\/tr>\n \n\tMain supply<\/td> 230 VAC\/3,15 A<\/td> 230 VAC\/max. 8 A<\/td> 230 VAC\/max. 8 A<\/td> 230 VAC\/max. 16A<\/td>\n<\/tr>\n \n\tDisplay<\/td> Graphics LCD 240x64<\/td> Graphics LCD 240x64<\/td> Graphics LCD 240x64<\/td> 2x Text LCD 4x40<\/td>\n<\/tr>\n \n\tInterfaces<\/td> RS232 or RS485 (ModBus RTU-Protocol) and EthernetIP (ModBus TCP Protocol) , Analog I\/O<\/td> RS232 or RS485 (ModBus RTU-Protocol) and EthernetIP (ModBus TCP Protocol) , Analog I\/O<\/td> RS232 or RS485 (ModBus RTU-Protocol) and EthernetIP (ModBus TCP Protocol) , Analog I\/O<\/td> RS232, Analog I\/O<\/td>\n<\/tr>\n \n\tArc management<\/td> Advanced; < 2 us response time<\/td> Advanced; < 2 us response time<\/td> Advanced; < 2 us response time<\/td> Detection: 100 ns<\/td>\n<\/tr>\n \n\tMonitoring of target usage<\/td> Yes<\/td> Yes<\/td> Yes<\/td> Yes<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n\n[\/et_pb_tab][et_pb_tab title=”Downloads” _builder_version=”4.16″ global_colors_info=”{}”]<\/p>\n
Brochure “MPS Magnetron Power Supplies” (2.50 MB)<\/a><\/p>\n
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| <\/td> | ![\"MPS1500P\"](\"https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/02\/MPS1500P-1.png\") <\/th> | <\/th> | <\/th> | ![\"\"](\"https:\/\/www.beamtec.de\/wp-content\/uploads\/2026\/01\/Pulsed-DC-Sputter-ISO.5-200x51-1.png\") <\/th>\n<\/tr>\n<\/thead>\n | |||||||||||||||||||||||||||||||||||||||||||||||||||||||
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| <\/td> | MPS500DC<\/h3><\/td>MPS1500DC<\/h3><\/td>MPS1500P<\/h3><\/td>KRI 3000<\/h3><\/td>\n<\/tr>\nMax output power<\/td> | 500 W DC<\/td> | 1500 W DC<\/td> | 1500 W (DC) | \n1050 W (Pulsed DC - unipolar) \n<\/td> 3000 W (DC \/unipolar gepulstes DC; reverse Charge)<\/td>\n<\/tr>\n | Output voltage<\/td> | 1000 V (ignition 1200 V)<\/td> | 1000 V (ignition 1200 V)<\/td> | 1000 V (ignition 1200 V)<\/td> | -1000 V; + 150 V<\/td>\n<\/tr>\n | Output current<\/td> | 2 A max<\/td> | 3 A max<\/td> | 3 A max<\/td> | 10 A max<\/td>\n<\/tr>\n | Mode of operation<\/td> | DC<\/td> | DC<\/td> | DC und PulseDC (duty cycle 2 ..70 %)<\/td> | DC and PulsedDC <\/td>\n<\/tr>\n | Outputs<\/td> | 2; connector N-Typ<\/td> | 2; connector N-Typ<\/td> | 2; connector N-Typ<\/td> | 1<\/td>\n<\/tr>\n | Frequency of operation<\/td> | -<\/td> | -<\/td> | 10..300 kHz for PulseDC<\/td> | 10 .. 100 kHz for PulsedDC<\/td>\n<\/tr>\n | Main supply<\/td> | 230 VAC\/3,15 A<\/td> | 230 VAC\/max. 8 A<\/td> | 230 VAC\/max. 8 A<\/td> | 230 VAC\/max. 16A<\/td>\n<\/tr>\n | Display<\/td> | Graphics LCD 240x64<\/td> | Graphics LCD 240x64<\/td> | Graphics LCD 240x64<\/td> | 2x Text LCD 4x40<\/td>\n<\/tr>\n | Interfaces<\/td> | RS232 or RS485 (ModBus RTU-Protocol) and EthernetIP (ModBus TCP Protocol) , Analog I\/O<\/td> | RS232 or RS485 (ModBus RTU-Protocol) and EthernetIP (ModBus TCP Protocol) , Analog I\/O<\/td> | RS232 or RS485 (ModBus RTU-Protocol) and EthernetIP (ModBus TCP Protocol) , Analog I\/O<\/td> | RS232, Analog I\/O<\/td>\n<\/tr>\n | Arc management<\/td> | Advanced; < 2 us response time<\/td> | Advanced; < 2 us response time<\/td> | Advanced; < 2 us response time<\/td> | Detection: 100 ns<\/td>\n<\/tr>\n | Monitoring of target usage<\/td> | Yes<\/td> | Yes<\/td> | Yes<\/td> | Yes<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n\n | [\/et_pb_tab][et_pb_tab title=”Downloads” _builder_version=”4.16″ global_colors_info=”{}”]<\/p>\n
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![\"adobe-pdf-icon\"](\"https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/02\/adobe-pdf-icon.png\"){kind=icon}
Brochure “MPS Magnetron Power Supplies” (2.50 MB)<\/a><\/p>\n![\"MPS1500P\"](\"https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/02\/MPS1500P.jpg\")
<\/a><\/p>\n