{"id":4239,"date":"2019-02-05T11:46:03","date_gmt":"2019-02-05T10:46:03","guid":{"rendered":"https:\/\/shop.beamtec.de\/wpl\/plasmastromversorgungen\/"},"modified":"2021-01-19T15:33:51","modified_gmt":"2021-01-19T14:33:51","slug":"plasma-power-supplies","status":"publish","type":"page","link":"https:\/\/www.beamtec.de\/en\/plasma-power-supplies\/","title":{"rendered":"Plasma Power Supplies"},"content":{"rendered":"

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Home<\/a> \u00bb Plasma Power Supplies<\/span><\/p>\n

[\/et_pb_text][\/et_pb_column][\/et_pb_row][et_pb_row _builder_version=”3.25″ column_structure=”1_5,1_5,1_5,1_5,1_5″][et_pb_column type=”1_5″ _builder_version=”3.25″ background_image=”https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/01\/MPS1500P-1.jpg” custom_padding=”|||” custom_padding__hover=”|||”][et_pb_cta title=”DC-\/Pulsed DC Supplies” button_text=”Button Text” _builder_version=”3.21.1″ header_font=”||||||||” header_font_size=”20px” body_font=”||||||||” body_text_color=”rgba(0,0,0,0)” use_background_color=”off” custom_padding=”80px||0px||false” custom_padding_last_edited=”off|desktop” hover_transition_duration=”500ms” link_option_url=”https:\/\/www.beamtec.de\/en\/dc-and-pulsed-dc-power-supplies\/” custom_css_promo_description=”background-color: rgba(119,119,119,0.5);||height: 100px” body_text_color__hover_enabled=”on” body_text_color__hover=”#ffffff” custom_padding__hover_enabled=”on” custom_padding__hover=”40px||40px”][\/et_pb_cta][\/et_pb_column][et_pb_column type=”1_5″ _builder_version=”3.25″ background_image=”https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/02\/MF-400.jpg” custom_padding=”|||” custom_padding__hover=”|||”][et_pb_cta title=”MF generators 40 kHz” button_text=”Button Text” _builder_version=”3.21.1″ header_font=”||||||||” header_font_size=”20px” body_font=”||||||||” body_text_color=”rgba(0,0,0,0)” use_background_color=”off” custom_padding=”80px||0px||false” custom_padding_last_edited=”off|desktop” hover_transition_duration=”500ms” link_option_url=”https:\/\/www.beamtec.de\/en\/mf-power-supplies-40-khz\/” custom_css_promo_description=”background-color: rgba(119,119,119,0.5);||height: 100px” body_text_color__hover_enabled=”on” body_text_color__hover=”#ffffff” custom_padding__hover_enabled=”on” custom_padding__hover=”40px||40px” header_text_color__hover=”#fe871f”]<\/p>\n

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[\/et_pb_cta][\/et_pb_column][et_pb_column type=”1_5″ _builder_version=”3.25″ background_image=”https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/02\/BDS_HF_AFP-800.jpg” custom_padding=”|||” custom_padding__hover=”|||”][et_pb_cta title=”RF power supplies” button_text=”Button Text” _builder_version=”3.21.1″ header_font=”||||||||” header_font_size=”20px” body_font=”||||||||” body_text_color=”rgba(0,0,0,0)” use_background_color=”off” custom_padding=”80px||0px||false” custom_padding_last_edited=”off|desktop” hover_transition_duration=”500ms” link_option_url=”https:\/\/www.beamtec.de\/en\/rf-power-supplies-1356-mhz\/” custom_css_promo_description=”background-color: rgba(119,119,119,0.5);||height: 100px” body_text_color__hover_enabled=”on” body_text_color__hover=”#ffffff” custom_padding__hover_enabled=”on” custom_padding__hover=”40px||40px”][\/et_pb_cta][\/et_pb_column][et_pb_column type=”1_5″ _builder_version=”3.25″ background_image=”https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/02\/222_bds_glow_2015.jpg” custom_padding=”|||” custom_padding__hover=”|||”][et_pb_cta title=”Arc\/Glow Power Supplies” button_text=”Button Text” _builder_version=”3.21.1″ header_font=”||||||||” header_font_size=”20px” body_font=”||||||||” body_text_color=”rgba(0,0,0,0)” use_background_color=”off” custom_padding=”80px||0px||false” custom_padding_last_edited=”off|desktop” hover_transition_duration=”500ms” link_option_url=”https:\/\/www.beamtec.de\/en\/arc-glow-power-supplies\/” custom_css_promo_description=”background-color: rgba(119,119,119,0.5);||height:100px” body_text_color__hover_enabled=”on” body_text_color__hover=”#ffffff” custom_padding__hover_enabled=”on” custom_padding__hover=”40px||40px”][\/et_pb_cta][\/et_pb_column][et_pb_column type=”1_5″ _builder_version=”3.25″ background_image=”https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/02\/MA-RFSWITCH-1I3O-N_01.jpg” custom_padding=”|||” custom_padding__hover=”|||”][et_pb_cta title=”DC-\/RF Switches” button_text=”Button Text” _builder_version=”3.21.1″ header_font=”||||||||” header_font_size=”20px” body_font=”||||||||” body_text_color=”rgba(0,0,0,0)” use_background_color=”off” custom_padding=”80px||0px||false” custom_padding_last_edited=”off|desktop” hover_transition_duration=”500ms” link_option_url=”https:\/\/www.beamtec.de\/en\/dc-rf-switches\/” custom_css_promo_description=”background-color: rgba(119,119,119,0.5);||height:100px” body_text_color__hover_enabled=”on” body_text_color__hover=”#ffffff” custom_padding__hover_enabled=”on” custom_padding__hover=”40px||40px”][\/et_pb_cta][\/et_pb_column][\/et_pb_row][et_pb_row _builder_version=”3.25″ custom_padding=”27px|0px|27px|0|false|false”][et_pb_column type=”4_4″ _builder_version=”3.25″ custom_padding=”|||” custom_padding__hover=”|||”][et_pb_text _builder_version=”3.27.4″]<\/p>\n

BeamTec GmbH provides supplies power for your plasma process.
In the program we have DC and pulsed DC power supplies, which can supply up to 1500 W for 2 connected magnetron sputtering sources or glow discharge electrodes.
They are also ideal for applications requiring precise coatings at low coating rates, as they can be stably operated even at low power levels (<2W).<\/p>\n

Our 40 kHz MF generators from BDISCOM were developed for plasma excitation in sputtering, PECVD and plasma cleaning processes. A special transformer allows for the use of atmospheric plasma.<\/span><\/p>\n

The 13,56 MHz RF Generators deliver a power output of 100 W to 750 W, this makes them suited for operation on small magnetrons or for smaller chambers.
<\/span>Matchboxes <\/span>matche the plasma impedance automatically to the 50 Ohm impedance of the 13,56 MHz generator<\/span><\/p>\n

The BDS-ARC devices are power supplies designed for arc evaporators with current consumtion of up to 250 A.
The BDS-GLOW devices are compact power supplies for glow discharge processes.<\/span>
<\/span><\/p>\n

Also in our program are DC \/ RF switches, RF blocking filter and low-pass filter from the manufacturer Manitou Systems. They are used to switch and connect the output of RF power generators, DC sputtering power supplies or impedance matching networks.<\/span><\/p>\n

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[\/et_pb_text][\/et_pb_column][\/et_pb_row][\/et_pb_section][et_pb_section fb_built=”1″ _builder_version=”3.22″ background_color=”#f7f7f7″ custom_padding=”0|0px|54px|0px|false|false”][et_pb_row _builder_version=”3.25″][et_pb_column type=”4_4″ _builder_version=”3.25″ custom_padding=”|||” custom_padding__hover=”|||”][et_pb_text _builder_version=”4.8.1″ hover_enabled=”0″ sticky_enabled=”0″]<\/p>\n\n\n\n\n\t\n\n\t\n\t\n\t\n\t\n\t\n\t\n\t
<\/td>DC\/Pulsed DC Supplies<\/a><\/th>Pulsed DC; reverse charge<\/th>MF Generators 40 kHz<\/a><\/th>RF Power Supplies<\/a><\/th>Arc Power Supplies<\/a><\/th>Glow Power Supplies<\/a><\/th>\n<\/tr>\n<\/thead>\n
<\/td>\"MPS1500P\"<\/a><\/td>\"PDC3000\"<\/td>\"MF<\/a><\/td>\"BDS<\/a><\/td>\"MF<\/a><\/td>\"Glimmstrom-Versorgung\"<\/a><\/td>\n<\/tr>\n
Max. Output Power<\/td>1500 W<\/td>3000 W<\/td>15 kW<\/td>750 W<\/td>6,25 kW<\/td>6,25 kW<\/td>\n<\/tr>\n
Max. Output Current<\/td>4 A<\/td>10 A<\/td>35 A<\/td>n. a.<\/td>250 A<\/td>1,6 A<\/td>\n<\/tr>\n
Max. Output Voltage<\/td>1200 V<\/td>1000 V; +150 V
\r\n<\/td>		800 V<\/td>n. a.<\/td>25 V<\/td>4000 V<\/td>\n<\/tr>\n
Mode of operation<\/td>DC and PulseDC (max. 300 kHz)<\/td>PulseDC (max. 100 kHz), reverse charge<\/td>MF 40 kHz
\nwith pulse option<\/td>		HF 13,56 MHz<\/td>DC<\/td>DC<\/td>\n<\/tr>\n
Interfaces<\/td>RS232 or RS485,
\nBluetooth, EthernetIP, Analog I\/O<\/td>		RS232, Analog I\/O<\/td>digital\/analog (PE II compatible interface);
\nRS232;
\nProfibus optional<\/td>		digital\/analog IO, RS232,
\nProfibus optional<\/td>		digital\/analog;
\nRS232;
\nProfibus optional<\/td>		digital\/analog;
\nRS232;
\nProfibus optional<\/td>\n<\/tr>\n
Dimensions<\/td>19\", 2 HE<\/td>19\", 2 HE<\/td>19\", 4 HE<\/td>1\/2 19\", 3 HE
\n<\/td>		19\" , 4 HE<\/td>19\", 4 HE<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n\n

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Home \u00bb Plasma Power Supplies   BeamTec GmbH provides supplies power for your plasma process.In the program we have DC and pulsed DC power supplies, which can supply up to 1500 W for 2 connected magnetron sputtering sources or glow discharge electrodes.They are also ideal for applications requiring precise coatings at low coating rates, as they […]<\/p>\n","protected":false},"author":2,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_et_pb_use_builder":"on","_et_pb_old_content":"","_et_gb_content_width":"","_vp_format_video_url":"","_vp_image_focal_point":[],"footnotes":""},"class_list":["post-4239","page","type-page","status-publish","hentry"],"yoast_head":"\nPlasma Power Supplies - BeamTec GmbH<\/title>\n<meta name=\"description\" content=\"Plasma power supplies, DC-\/pulsed DC supply, MF generators, RF power supplies, DC-\/RF switches\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.beamtec.de\/en\/plasma-power-supplies\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Plasma Power Supplies - 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