{"id":4228,"date":"2019-01-15T13:54:58","date_gmt":"2019-01-15T12:54:58","guid":{"rendered":"https:\/\/shop.beamtec.de\/wpl\/ionenquellen\/"},"modified":"2019-03-08T15:43:30","modified_gmt":"2019-03-08T14:43:30","slug":"ion-sources","status":"publish","type":"page","link":"https:\/\/www.beamtec.de\/en\/ion-sources\/","title":{"rendered":"Ion Sources"},"content":{"rendered":"

[et_pb_section fb_built=”1″ _builder_version=”3.18.4″ background_color=”#f7f7f7″ max_width_phone=”100%” max_width_last_edited=”on|desktop” custom_margin=”|||0px” custom_padding=”0px||10px” saved_tabs=”all”][et_pb_row make_fullwidth=”on” custom_width_px=”2600px” use_custom_gutter=”on” gutter_width=”1″ custom_padding=”75px||75px|0px|true” custom_margin=”|||” custom_padding_last_edited=”on|desktop” padding_top_bottom_link_1=”true” padding_top_1=”0px” padding_bottom_1=”0px” padding_left_1=”0px” _builder_version=”3.19.12″ background_image=”https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/01\/Ionenquellen-blur-1.png” module_alignment=”center”][et_pb_column type=”4_4″ _builder_version=”3.18.4″][et_pb_blurb title=”Ion Sources” content_max_width=”718px” _builder_version=”3.19.8″ header_level=”h1″ header_font=”||||||||” header_text_align=”center” header_text_color=”#fe871f” header_font_size=”59px” header_font_size_tablet=”37px” header_font_size_phone=”25px” header_font_size_last_edited=”on|tablet” body_font=”||||||||” body_text_align=”center” body_text_color=”#ffffff” body_font_size=”30px” body_font_size_tablet=”25px” body_font_size_phone=”20px” body_font_size_last_edited=”on|phone” custom_margin=”34px||” custom_padding=”25px||25px||true” custom_padding_tablet=”0px||0px|” custom_padding_phone=”0px||0px|” custom_padding_last_edited=”on|desktop”][\/et_pb_blurb][\/et_pb_column][\/et_pb_row][\/et_pb_section][et_pb_section fb_built=”1″ _builder_version=”3.18.4″ background_color=”#f7f7f7″ custom_padding=”0|0px|0|0px|false|false”][et_pb_row custom_padding=”0|0px|27px|0px|false|false” _builder_version=”3.18.4″][et_pb_column type=”4_4″ _builder_version=”3.18.4″][et_pb_text _builder_version=”3.18.4″]<\/p>\n

Home<\/a>\u00bb Ion Sources<\/span><\/p>\n

[\/et_pb_text][\/et_pb_column][\/et_pb_row][et_pb_row custom_padding=”27px|0|27px||false|false” _builder_version=”3.18.4″ background_size=”initial” background_position=”top_left” background_repeat=”repeat”][et_pb_column type=”3_5″ _builder_version=”3.0.47″][et_pb_text _builder_version=”3.19.17″]<\/p>\n

Grid and gridless ion sources<\/h3>\n

BeamTec GmbH exclusively sells the “Next Generation” series ion sources by Kaufman & Robinson, Inc (KRI). In addition to gridless end-Hall ion sources, the product range also includes grid ion sources in Kaufman and RFICP versions. All units are designed to be straightforward to retrofit into existing deposition systems, or to integrate as an accessory into a new deposition system.<\/p>\n

Typical applications can be found, for example, in ion beam assisted vaporation (IBAD), substrate cleaning and the production of diamond-like layers (DLC).<\/p>\n

[\/et_pb_text][\/et_pb_column][et_pb_column type=”2_5″ _builder_version=”3.0.47″][et_pb_image src=”https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/01\/KRi.png” url=”https:\/\/ionsources.com\/” url_new_window=”on” _builder_version=”3.19.12″ max_width=”49%” module_alignment=”left”][\/et_pb_image][et_pb_text _builder_version=”3.19.12″ header_font=”||||||||” header_3_font=”||||||||” header_3_text_color=”#fe871f” custom_margin=”0px||0px” custom_padding=”0px||0px”]<\/p>\n

About Kaufman & Robinson Inc.<\/a><\/h3>\n

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KRI is an American company that specializes in the development, production and distribution of ion beam sources and related power supplies. Over the past 30 years, KRI has developed a wide range of ion sources, including the EH1000 model as a successor to the successful Mark II source. KRI is a developer and patent proprietor of the gridless End-Hall technology and holds a variety of other patents in the field of ion beam technology.<\/p>\n

[\/et_pb_text][\/et_pb_column][\/et_pb_row][et_pb_row custom_padding=”0px|0px|0px|0px|true|false” custom_margin=”0px||0px” padding_top_1=”0px” padding_bottom_1=”0px” _builder_version=”3.19.5″][et_pb_column type=”4_4″ _builder_version=”3.19.5″][et_pb_divider divider_position=”center” _builder_version=”3.19.5″ custom_margin=”0px||” custom_padding=”||”][\/et_pb_divider][\/et_pb_column][\/et_pb_row][\/et_pb_section][et_pb_section fb_built=”1″ _builder_version=”3.19.5″ background_color=”#f7f7f7″ custom_padding=”0|0px|54px|0px|false|false”][et_pb_row _builder_version=”3.19.5″][et_pb_column type=”3_5″ _builder_version=”3.19.5″][et_pb_text _builder_version=”3.19.12″ text_font=”||||||||” header_font=”||||||||”]<\/p>\n

Linear Ion Sources<\/h2>\n

New to our program are the linear ion sources of Beams & Plasmas.
These ion sources produce a wide ion beam of high uniformity along their length. They are very reliable and robust and can be operated with many gases and gas mixtures.
They do not require an extra neutralizer for charge compensation and can therefore be used permanently with chemically active gases such as oxygen, air, halogens, etc.
The electrodes have an almost unlimited lifetime when, for example, oxygen is used as a process gas.<\/p>\n

Our range includes linear ion sources ranging in lengths from 125 mm to 800 mm and a compact round source with a diameter of 52 mm.<\/p>\n

These ion sources are typically used for ion cleaning, ion etching, ion beam sputtering (IBS), ion beam assisted deposition (IBAD), PECVD and DLC coatings and surface treatment.<\/p>\n

[\/et_pb_text][\/et_pb_column][et_pb_column type=”2_5″ _builder_version=”3.19.5″][et_pb_image src=”https:\/\/www.beamtec.de\/wp-content\/uploads\/2019\/01\/beams-and-plasmas.png” url=”http:\/\/e-beam.ru\/en” url_new_window=”on” _builder_version=”3.19.12″][\/et_pb_image][et_pb_text _builder_version=”3.19.12″ header_font=”||||||||” header_3_font=”||||||||” header_3_text_color=”#fe871f”]<\/p>\n

About Beams & Plasmas<\/a><\/h3>\n

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Beams & Plasmas is a Russian manufacturer of ion sources based on the principle of inverted magnetrons as well as RF plasma sources with 13.56 MHz excitation frequency. <\/p>\n

[\/et_pb_text][\/et_pb_column][\/et_pb_row][et_pb_row custom_padding=”0|0px|27px|0px|false|false” _builder_version=”3.19.8″][et_pb_column type=”4_4″ _builder_version=”3.19.8″][et_pb_text _builder_version=”3.19.18″]<\/p>\n

Product range<\/h2>\n
\n\n\n\n\n\t\n\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t
<\/th>End-Hall<\/a><\/strong><\/th>Anode Layer<\/a><\/strong><\/th>RF ICP Plasma<\/strong><\/th>RF Plasma<\/strong><\/th>Kaufman KDC<\/a><\/strong><\/th>RF ICP<\/a><\/strong><\/th>\n<\/tr>\n<\/thead>\n
<\/td>\"\"\"L145\"\"RF2100ICP\"\"RFPG128\"\"kdc40\"\"RFICP140\"
<\/td>\"Kaufman\"Beams&Plasma\"Kaufman\"Beams&Plasma\"Kaufman\"Kaufman
<\/td>gridless<\/td>gridless<\/td>gridless<\/td>gridless<\/td>2\/3 grids<\/td>2\/3 grids<\/td>\n<\/tr>\n
Plasma discharge<\/td>DC<\/td>DC<\/td>2 MHz<\/td>13,56 MHz<\/td>DC<\/td>2 MHz<\/td>\n<\/tr>\n
Ion energy [eV]<\/td>20 - 210<\/td>500 - 2500<\/td>5 - 50<\/td>5 - 50<\/td>100 - 1500<\/td>100 - 1500<\/td>\n<\/tr>\n
Max. Ion current [mA]<\/td>6000<\/td>2000<\/td><\/td><\/td>1000<\/td>1000<\/td>\n<\/tr>\n
Beam shape<\/td>Gaussian distributed,
\n45\u00b0 HWHM<\/td>		hollow shape<\/td>Gaussian distributed<\/td>Gaussian distributed<\/td>focused \/ collimated \/
\ndefocused<\/td>		focused \/ collimated \/
\ndefocused<\/td>\n<\/tr>\n
Max. beam coverage
\n@ 300 mm [mm]<\/td>		500 dia<\/td>775 x 42 (L800)<\/td>500 dia<\/td>500 dia<\/td>300 dia (KDC160)<\/td>400 dia (RFICP360)<\/td>\n<\/tr>\n
Apperture \/ grid diameter [mm]<\/td><\/td>D22,
\n42 x 120 \/ 375 \/ 575 \/ 775<\/td>		140<\/td>128, 250<\/td>10, 40, 80, 120, 160<\/td>40, 120
\n 140, 220, 360<\/td>\n<\/tr>\n
Pressure [mbar]<\/td>1E-5 - 5E-3<\/td>1E-5 - 1E-1<\/td>5E-4 - 1E-2<\/td>1E-3 - 1E-1<\/td>1E-5 - 5E-4<\/td>1E-5 - 5E-4<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n\n<\/div>\n

[\/et_pb_text][\/et_pb_column][\/et_pb_row][et_pb_row custom_padding=”27px|0px|0|0px|false|false” _builder_version=”3.19.5″][et_pb_column type=”4_4″ _builder_version=”3.19.5″][et_pb_text _builder_version=”3.19.5″]<\/p>\n

We are happy to send you up-to-date product information on request via info@beamtec.de.<\/a><\/p>\n

[\/et_pb_text][\/et_pb_column][\/et_pb_row][\/et_pb_section]<\/p>\n","protected":false},"excerpt":{"rendered":"

Home\u00bb Ion SourcesGrid and gridless ion sources BeamTec GmbH exclusively sells the “Next Generation” series ion sources by Kaufman & Robinson, Inc (KRI). In addition to gridless end-Hall ion sources, the product range also includes grid ion sources in Kaufman and RFICP versions. All units are designed to be straightforward to retrofit into existing deposition […]<\/p>\n","protected":false},"author":2,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_et_pb_use_builder":"on","_et_pb_old_content":"","_et_gb_content_width":"","footnotes":""},"yoast_head":"\nIon Sources - Accessories and consumables - BeamTec GmbH<\/title>\n<meta name=\"description\" content=\"Gridless End-Hall Ion Sources, Gridded, Kaufman- and RFICP-, compact Anode Layer Ion Sources with\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.beamtec.de\/en\/ion-sources\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Ion Sources - Accessories and consumables - BeamTec GmbH\" \/>\n<meta property=\"og:description\" content=\"Gridless End-Hall Ion Sources, Gridded, Kaufman- and RFICP-, compact Anode Layer Ion Sources with\" \/>\n<meta property=\"og:url\" content=\"https:\/\/www.beamtec.de\/en\/ion-sources\/\" \/>\n<meta property=\"og:site_name\" content=\"BeamTec GmbH\" \/>\n<meta property=\"article:modified_time\" content=\"2019-03-08T14:43:30+00:00\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"Est. reading time\" \/>\n\t<meta name=\"twitter:data1\" content=\"5 minutes\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\/\/www.beamtec.de\/en\/ion-sources\/\",\"url\":\"https:\/\/www.beamtec.de\/en\/ion-sources\/\",\"name\":\"Ion Sources - 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