Ferrofluid Sealed Vacuum Feedthroughs

BeamTec provides a full line of rotary feedthroughs for vacuum applications. A hermetic sealing is achieved by means of magnetic liquid O-rings that surround the shaft and thus provide a liquid barrier for the differential pressure.

The most typical application for this type of feedthroughs is any kind of rotational motion transfer in vacuum process systems like for substrate holder, carrier systems or swing shutters.

The standard range of products include:

  • Solid Shaft Vacuum Feedthroughs
  • Hollow Shaft Vacuum Feedthroughs
Other versions can be designed according to customer requirements.

 

BeamTec Rotary Vacuum Feedthroughs

EB-2 Multi Hearth Solid Shaft Feedthroughs
Solid Shaft Feedthroughs are available in different mounting configurations like threaded, nut or flange mount configurations with shaft diameters from 4 - 50 mm.
Typical mounting and design configurations include
EB-5 Single Hearth

Hollow Shaft Feedthroughs
Hollow Shaft Feedthroughs are available in different mounting configurations with shaft diameters from 10 - 75 mm.
Typical mounting and design configurations include

  Benefits
Hermetic sealing
The magnetic liquid surrounding the shaft provides a hermetic seal against gas, vapor, mist and other contaminants, Leakage rates are below 10-11mbar*l/s to achieve vacuum levels of 10-8mbar without differential pumping.

High reliability
The seal contains a permanent magnet and a non-wearing magnetic fluid. The only parts subject to mechanical wear are self-contained ball bearings. So devices have been in operation for over ten years without maintenance.

Optimum torque transmission
Through-shaft construction enables 100% torque transmission and provides in-phase rotation without backlash; the power wear is just bearing wear.

High speed capability
Motion with a rotational speed of 20m/s can be transferred.