Ion Source Product Line

BeamTec provides a full line of gridless end hall and gridded ion sources by KRI. Typical systems applications for the sources include:

  • Metal Deposition Systems
  • Dielectric Deposition Systems
  • Ion Beam Etching Systems
  • Diamond-like Carbon (DLC) Overcoat Systems
  • E-Beam Deposition Systems

EH1000 Ion Source

© KRI 2005

Ion Source Technology

GRIDLESS END HALL SOURCES GRIDDED KAUFMAN ION SOURCES GRIDDED RF ICP ION SOURCES
EH Technology -click to enlarge
Features & Benefits

  • Gridless
    • Repeatable, stable beam
  • High ion beam current
    • up to 6 A
  • Low ion energy
    • 40-210eV
  • Divergent beam
    • 30° half angle
  • Modular Anode
    • Ease of maintenance
  • Complete charge neutralization
    • Automatic

Features & Benefits
  • Gridded
    • DC discharge generation
  • High ion energies
    • up to 1200eV
  • OptiBeam™ self-aligned ion optics
    • Constant beam profile
  • Collimated, focused or defocused beam
    • grid optics adjustable
  • Controlled neutralization

Features & Benefits

  • Gridded
    • RF ICP discharge generation
  • High ion energies
    • up to 1200eV
  • OptiBeam™ self-aligned ion optics
    • Constant beam profile
  • Collimated, focused or defocused beam
    • grid optics adjustable
  • Controlled neutralization

Gridless Ion Sources Products

          
 
EH2000
EH3000
Discharge Power
max. 200W
max. 400 W
max. 850 W
max. 1700 W
max. 3000 W
Water Cooling
radiant
radiant
optional
yes
optional
Anode Current
2 A
3.5 A
8 A
10 A
20 A
Beam Current@ Discharge Current
(screened probe)
500 mA @ 2A
875 mA @ 3,5A
2000 mA @ 8A
2500 mA @ 10A
6000 mA @ 10A
Anode Voltage
300 Volts max
300 Volts max
300 Volts max
300 Volts max
250 Volts max
Beam Energy
35-210 eV mean
35-210 eV mean
35-210 eV mean
35-210 eV mean
35-200 eV mean
Gas Flow
1-20 sccm
1-50 sccm
1-100 sccm
1-100 sccm
1-150 sccm
Pressure
< 1 x 10-3 mbar
< 1 x 10-3 mbar
< 1 x 10-3 mbar
< 1 x 10-3 mbar
< 1 x 10-3 mbar
Divergence
60°
   

DC Gridded Ion Sources Products

  
 
KDC10
KDC40
KDC75
KDC100
KDC160
Discharge
DC Thermionic
Discharge Power
max. 50 W
max. 200 W
max. 400 W
max. 700 W
max. 1200 W
Beam current (max)*
> 10 mA
> 100 mA
> 250 mA
> 500 mA
> 1000 mA
Voltage Range
100 - 1200 V
Gases
Inert, reactive & organic
Grids
Graphite
Molybdenum & Graphite; divergent / collimated
       

RFICP Gridded Ion Sources Products

          
 
RFICP40
RFICP100
RFICP140
RFICP200
RFICP300
Discharge
RF ICP
Discharge Power
max. 600 W
max. 1000 W
max. 100 W
max. 1500 W
max. 2000 W
Ion Beam Current
>100 mA
>350 mA
>600 mA
>800 mA
>1500 mA
Voltage Range
100 - 1200 V
Gases
Inert, reactive & organic
Grids
Molybdenum & Graphite
Beam Shape
Collimated, convergent, divergent

Please request a copy of the new brochure "Gridless Ion Beam Sources" at info@beamtec.de.

Ion Beam Sources Brochure