BeamTec GmbH is a company specialized in electron and ion beam products and related components. BeamTec represents various manufacturers with high innovation potential and reliable products. Our customers can profit from extensive market knowledge and competence in supplying leading edge products.

ion beam source, end hall, electron beam, evaporator, high voltage, e-gun, guns, thin-film, hochspannung, elektronenstrahl, verdampfung, elektronenstrahlverdampfer, liner, filamente, crucibles, power supply, Sales and service company for vacuum and thin-film industry.Provides electron beam evaporators, quartz, quartz, quarze, QCM, crystal microbalance, high-voltage power supplies and related products, primary switched, fast arc management, alimentations haute tension, Évaporateur à faisceau d'électrons, KRI, Kaufman & Robinson, Ferrotec, Maxtek, Telemark, PST, MDC, Temescal, Tiegel, Heizwendel, Graphite, Grafit, controller, primär getaktete Hochspannungsversorgung, Schnittstellen, interface, Vertrieb, Filderstadt Germany Deutschland, Ferrofluidics, Magnetflüssigkeit, ferrofluid, Dichtung, Rotary Drive Feedthrough, magnetically sealed feedthrough, hermetic seal, liquid
   
 

Ion Beam Sources by Kaufman & Robinson Inc.

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BeamTec GmbH - Ion Beam Sources

Ion Source Product Line

BeamTec provides a full line of gridless end hall and gridded ion sources by KRI. Typical systems applications for the sources include:

  • Metal Deposition Systems
  • Dielectric Deposition Systems
  • Ion Beam Etching Systems
  • Diamond-like Carbon (DLC) Overcoat Systems
  • E-Beam Deposition Systems

EH1000 Ion Source

© KRI 2005

Ion Source Technology

GRIDLESS END HALL SOURCES GRIDDED KAUFMAN ION SOURCES GRIDDED RF ICP ION SOURCES
EH Technology -click to enlarge
Features & Benefits

  • Gridless
    • Repeatable, stable beam
  • High ion beam current
    • up to 6 A
  • Low ion energy
    • 40-210eV
  • Divergent beam
    • 30° half angle
  • Modular Anode
    • Ease of maintenance
  • Complete charge neutralization
    • Automatic

Features & Benefits
  • Gridded
    • DC discharge generation
  • High ion energies
    • up to 1200eV
  • OptiBeam™ self-aligned ion optics
    • Constant beam profile
  • Collimated, focused or defocused beam
    • grid optics adjustable
  • Controlled neutralization

Features & Benefits

  • Gridded
    • RF ICP discharge generation
  • High ion energies
    • up to 1200eV
  • OptiBeam™ self-aligned ion optics
    • Constant beam profile
  • Collimated, focused or defocused beam
    • grid optics adjustable
  • Controlled neutralization

Gridless Ion Sources Products

          
 
EH2000
EH3000
Discharge Power
max. 200W
max. 400 W
max. 850 W
max. 1700 W
max. 3000 W
Water Cooling
radiant
radiant
optional
yes
optional
Anode Current
2 A
3.5 A
8 A
10 A
20 A
Beam Current@ Discharge Current
(screened probe)
500 mA @ 2A
875 mA @ 3,5A
2000 mA @ 8A
2500 mA @ 10A
6000 mA @ 10A
Anode Voltage
300 Volts max
300 Volts max
300 Volts max
300 Volts max
250 Volts max
Beam Energy
35-210 eV mean
35-210 eV mean
35-210 eV mean
35-210 eV mean
35-200 eV mean
Gas Flow
1-20 sccm
1-50 sccm
1-100 sccm
1-100 sccm
1-150 sccm
Pressure
< 1 x 10-3 mbar
< 1 x 10-3 mbar
< 1 x 10-3 mbar
< 1 x 10-3 mbar
< 1 x 10-3 mbar
Divergence
60°
   

DC Gridded Ion Sources Products

  
 
KDC10
KDC40
KDC75
KDC100
KDC160
Discharge
DC Thermionic
Discharge Power
max. 50 W
max. 200 W
max. 400 W
max. 700 W
max. 1200 W
Beam current (max)*
> 10 mA
> 100 mA
> 250 mA
> 500 mA
> 1000 mA
Voltage Range
100 - 1200 V
Gases
Inert, reactive & organic
Grids
Graphite
Molybdenum & Graphite; divergent / collimated
       

RFICP Gridded Ion Sources Products

          
 
RFICP40
RFICP100
RFICP140
RFICP200
RFICP300
Discharge
RF ICP
Discharge Power
max. 600 W
max. 1000 W
max. 100 W
max. 1500 W
max. 2000 W
Ion Beam Current
>100 mA
>350 mA
>600 mA
>800 mA
>1500 mA
Voltage Range
100 - 1200 V
Gases
Inert, reactive & organic
Grids
Molybdenum & Graphite
Beam Shape
Collimated, convergent, divergent

Please request a copy of the new brochure "Gridless Ion Beam Sources" at info@beamtec.de.

Ion Beam Sources Brochure

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