BeamTec GmbH is a company specialized in electron and ion beam products and related components. BeamTec represents various manufacturers with high innovation potential and reliable products. Our customers can profit from extensive market knowledge and competence in supplying leading edge products.

ion beam source, end hall, electron beam, evaporator, high voltage, e-gun, guns, thin-film, hochspannung, elektronenstrahl, verdampfung, elektronenstrahlverdampfer, liner, filamente, crucibles, power supply, Sales and service company for vacuum and thin-film industry.Provides electron beam evaporators, quartz, quartz, quarze, QCM, crystal microbalance, high-voltage power supplies and related products, primary switched, fast arc management, alimentations haute tension, Évaporateur à faisceau d'électrons, KRI, Kaufman & Robinson, Ferrotec, Maxtek, Telemark, PST, MDC, Temescal, Tiegel, Heizwendel, Graphite, Grafit, controller, primär getaktete Hochspannungsversorgung, Schnittstellen, interface, Vertrieb, Filderstadt Germany Deutschland, Ferrofluidics, Magnetflüssigkeit, ferrofluid, Dichtung, Rotary Drive Feedthrough, magnetically sealed feedthrough, hermetic seal, liquid
   
 

Ion Beam Sources by Kaufman & Robinson Inc.

 Printer friendly view
BeamTec GmbH - RF ICP Plasma Sources

Gridded DC Ion Sources - Kaufman Type

BeamTec presents the Kaufman ion source by Kaufman & Robinson Inc.
With this new line KRI expands its product range for applications requiring higher ion energies. Typical applications include

  • Ion beam etching and milling
  • Ion beam assist deposition
  • Ion beam sputter deposition
  • Plasma surface modification and texturing
  • Direct deposition of thin and hard coatings

RF ICP Plasma Source

© KRI 2007

KDC Gridded DC Series

 

RF ICP 20cm gridded ion beam source Features
  • DC Thermionic discharge
  • Optlin self aligning ion optics
  • Netralization with Filament or LFN (low frequency neutralizer)
  • Gas compatibility with Ar, Kr, Xe, O2, N2, H2, others
  • Beam Type: collimated, convergent, divergent
  • Internal mount or CF mount versions

 
 
KDC10
KDC40
KDC75
KDC100
KDC160
Ion Beam Current
> 10 mA
> 100 mA
> 250 mA
> 400 mA
> 650 mA
Beam Voltage
100 - 1200 V
100 - 1200 V
100 - 1200 V
100 - 1200 V
100 - 1200 V
Beam Size @ grid
10 mm Φ
40 mm Φ
75 mm Φ
100 mm Φ
160 mm Φ
Gas Flow
1-5 sccm
2-10 sccm
2-15 sccm
2-2 0sccm
2-30 sccm
Length
4.5” (11.5cm)
6.75” (17.1cm)
7.9” (20.1cm)
9.25” (23.5cm)
9.92” (25.2cm)
Diameter
1.52” (4cm)
9.25” (23.5cm)
5.5” (14cm)
7.6” (19.4cm)
9.1” (23.2cm)

   NEWS

McVac Sensor Heads & Feedthroughs

BeamTec appointed exclusive distributor by McVac Inc. More ...

COLNATEC Quartzes

High-end quartzes by Colnatec More ...

New High Voltage Power Supplies

BeamTec GmbH presents the new WARP-series of high voltage power supplies. More ...

Rotary Vacuum Feedthroughs

BeamTec GmbH presents new magnetically sealed vacuum feedthroughs. More ...

Online Shop open!

BeamTec opens its online shop for spare parts and consumables.Enter Shop
About Us | Imprint | Contact Us | ©2011 BeamTec GmbH