BeamTec GmbH is a company specialized in electron and ion beam products and related components. BeamTec represents various manufacturers with high innovation potential and reliable products. Our customers can profit from extensive market knowledge and competence in supplying leading edge products.

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Ion Beam Sources by Kaufman & Robinson Inc.

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BeamTec GmbH - Ion Beam Sources - EH400

EH200 Gridless Ion Source

The eH200 is the most compact gridless ion source of the Next Generation series by Kaufman & Robinson Inc and provides a cost effective option for R&D and small systems.

The design of the KRI eH200 ion beam product was developed with KRIs world recognized expertise in plasma physics, ion source design and power control engineering, as well as its acquired process application knowledge.

The eH200 product line produces a high current and low energy ion beam ideally suited for surface treatment and thin film growth applications.

© KRI 2004

EH200 Versions
The EH 200 being of physically compact design is ideally suited for smaller deposition systems or installation where system baseplate space restrictions apply. Its physical dimensions of only 6.4 cm dia. x 5.1 cm height disguise its powerful potential of producing up to 500mA of ion beam current..

EH 400 Ion Source - Filament Version EH200F - Filament Version
This unit utilizes a robust tungsten cathode filament to provide both the plasma discharge and automatic beam neutralization. New design features enable the source to operate for extended periods with either inert or reactive gases.
EH 400 Ion Source -HC Version EH200HC - Hollow Cathode Version
This unit is provided with a new design hollow cathode electron source in place of the filament. Extremely long operational times are possible and the absence of a thermionic filament promotes a very high purity thin film environment.
 
 
EH200
Anode Current
2.0 A
Beam Current
500 mA max
Anode Voltage
40-300 Volts max
Beam Energy
25-210 eV mean
Gas Flow
1-20 sccm
Divergence
60°
Height
5.1 cm
Pressure
Up to 1 x 10-3 mbar
Weight
0.4 kg

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